Charged Particle Beam System Multi-Beam Segmentation
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Solution Overview
Problem
Current multi beam charged particle beam systems face challenges in effectively arranging particle optical components to separate and focus charged particle beamlets, and in providing an efficient projection and detection system for secondary charged particle beamlets produced from interaction products.
Innovation Solution
The system includes a charged particle source, a multi beam generator to create spatially separated charged particle beamlets, an objective lens to focus these beamlets into distinct regions, and a projection and detection system with individual detectors and magnetic field lenses to image interaction products, utilizing a combination of energy filters, magnetic and electrostatic lenses, and aberration correction elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple charged particle beamlets are generated and focused onto a sample, then productivity is improved through parallel processing, but device complexity increases due to the need for multiple particle optical components and beam control systems
Solution Approach 1:
The system segments the charged particle beam into multiple spatially separated beamlets using a multi-beam generator, allowing parallel processing of different sample regions. Each beamlet can be independently controlled and focused, enabling simultaneous analysis of multiple areas while maintaining manageable complexity through modular beam control
Solution Approach 2:
The patent introduces a field lens system that operates in the angular dimension of phase space to control beamlet trajectories. By manipulating the angular distribution of particles through field lenses, the system achieves precise spatial separation and focusing of multiple beamlets without requiring proportionally more complex optical components
2Measurement precision
If interaction products from multiple beamlets are detected simultaneously, then measurement precision is improved through parallel detection, but crosstalk between detection regions increases
Solution Approach 1:
The detection system is segmented into multiple independent detection regions, each associated with a specific beamlet impact area on the sample. This spatial segmentation allows simultaneous detection of interaction products from different beamlets while preventing crosstalk through physical or magnetic isolation of detection channels
Solution Approach 2:
Field lenses act as intermediary optical elements that guide interaction products (secondary particles) from specific beamlet impact regions to corresponding detection regions. These lenses create distinct phase space trajectories that prevent mixing of signals from different beamlets, eliminating crosstalk while enabling parallel detection
3Manufacturing precision
If field lenses are used to control charged particle beamlets, then manufacturing precision is improved through better beam focusing, but device complexity increases due to additional optical components
Solution Approach 1:
The field lens system is designed to perform multiple functions: focusing individual beamlets, separating beamlets in space, and guiding interaction products to detectors. This multi-functionality reduces the need for separate components for each task, achieving high focusing precision without proportionally increasing device complexity
Solution Approach 2:
The field lenses utilize adjustable magnetic or electrostatic field parameters to dynamically control beamlet trajectories and focusing. By changing field strength and distribution parameters rather than physically reconfiguring optical components, the system achieves precise beam control with simpler hardware
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the separation and focusing of charged particle beamlets, improves the imaging of interaction products, and reduces crosstalk between detection regions, leading to more accurate and efficient detection of secondary charged particles.
Implementation Method 1
a charged particle source configured to generate a first charged particle beam
Implementation Method 2
a multi beam generator configured to generate a plurality of charged particle beamlets from an incoming first charged particle beam. Each individual beamlet of the plurality of charged particle beamlets thereby is spatially separated from other beamlets
Implementation Method 3
an objective lens configured to focus incoming charged particle beamlets in a first plane in a manner that a first region in which a first individual beamlet of the plurality of charged particle beamlets impinges in the first plane is spatially separated from a second region
Implementation Method 4
the projection system is configured to image interaction products leaving the first region within the first plane due to impinging charged particles onto a first one of the plurality of individual detectors
Implementation Method 5
a combination of energy filters, magnetic and electrostatic lenses
Data Source
AI summary
A charged particle beam system includes a charged particle source that generates a first charged particle beam and a multi beam generator that generates a plurality of charged particle beamlets from an incoming first charged particle beam. Each individual beamlet is spatially separated from other beamlets. The charged particle beam system also includes an objective lens that focuses incoming charged particle beamlets in a first plane so that a first region in which a first individual beamlet impinges in the first plane is spatially separated from a second region in which a second individual beamlet impinges in the first plane. The charged particle beam system also includes a projection system and a detector system including a plurality of individual detectors. The projection system images interaction products leaving the first region within the first plane due to impinging charged particles onto a first detector and images interaction products leaving the second region in the first plane onto a second detector.