Charged Particle Beam Device Recipe Optimization
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Solution Overview
Problem
The existing semiconductor inspection devices using charged particle beams face challenges in optimizing imaging conditions and parameters, leading to lengthy evaluation times and increased data amounts, making it inefficient to generate and optimize recipes for new semiconductor manufacturing processes.
Innovation Solution
A charged particle beam device that includes a computer system capable of generating frame images, performing image processing, and calculating moment images and feature data, allowing for the generation of pseudo images to simulate and optimize imaging conditions efficiently, thereby reducing evaluation time and data volume.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If recipe optimization is performed by repeatedly executing the recipe under various imaging conditions, then imaging conditions and parameters can be optimized, but the evaluation time becomes excessively long and data amount increases
Solution Approach 1:
The patent creates a virtual copy of the inspection system through simulation. A recipe simulation unit generates simulated frame images based on recipe parameters without requiring actual physical inspection execution. This virtual copying allows multiple optimization iterations to be performed on simulated data rather than requiring repeated physical executions, dramatically reducing evaluation time while maintaining optimization accuracy
Solution Approach 2:
The patent performs preliminary simulation and evaluation before actual recipe execution. By pre-evaluating recipe parameters through simulated frame image generation and defect image generation, the system identifies optimal parameters in advance. This preliminary action prevents the need for extensive post-execution optimization iterations, thereby reducing total evaluation time
2Measurement precision
If recipe optimization is performed by repeatedly executing the recipe under various imaging conditions, then imaging conditions and parameters can be optimized, but the data amount increases
Solution Approach 1:
Instead of generating and storing large amounts of actual inspection data through repeated physical executions, the patent generates simulated frame images and defect images through computational modeling. This virtual copying creates sufficient optimization data with minimal physical resource consumption, reducing the actual data storage requirements while providing adequate data for accurate parameter optimization
Solution Approach 2:
The patent extracts only the essential features and parameters needed for optimization from the complex inspection process. By focusing simulation on critical defect detection parameters and key imaging conditions rather than processing complete inspection datasets, the system reduces data amount while maintaining optimization effectiveness
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly shortens the time required for recipe evaluation while minimizing data growth, enabling faster and more reproducible inspections with improved parameter optimization and reduced sample damage.
Implementation Method 1
a microscope that scans a charged particle beam with respect to a sample, detects secondary particles emitted from the sample, and outputs a detection signal
Data Source
AI summary
To shorten a time required for evaluation of a recipe while suppressing an increase in a data amount. A charged particle beam device includes a microscope that scans a charged particle beam on a sample, detects secondary particles emitted from the sample, and outputs a detection signal and a computer system that generates a frame image based on the detection signal and processes an image based on the frame images. The computer system calculates a moment image between a plurality of the frame images, and calculates a feature amount data of the frame image based on a moment.