Charged Particle Beam Device Rotating Specimen Base
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Solution Overview
Problem
Current methods for observing the three-dimensional internal structure of specimens using optical microscopes are limited by their small depth of focus, while electron microscopes require complex specimen preparation and handling to achieve three-dimensional imaging, making it difficult to accurately observe structures observed with optical microscopes using electron microscopes.
Innovation Solution
A charged particle beam device with a rotating specimen base and control unit that allows for the acquisition of transmitted charged particle images at various angles, enabling accurate three-dimensional positional and density distribution analysis of specimen internal structures, and a specimen base that converts charged particle beams into light for detection, facilitating seamless observation between optical and electron microscopes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If a specimen is observed with an optical microscope to obtain color information, then color information can be acquired, but the depth of focus is small and only a specific depth or thickness can be observed
Solution Approach 1:
The patent combines optical microscope observation and electron microscope observation into a unified workflow. The specimen base with detecting element serves as a common platform for both types of microscopes, allowing color information from optical observation and high-resolution structural information from electron observation to be integrated and compared directly without specimen remounting
Solution Approach 2:
The specimen base is designed to be universally compatible with both optical microscopes and electron microscopes. The detecting element can detect both light signals (for optical observation) and charged particle signals (for electron observation), making the same specimen base and specimen applicable to multiple observation modes
2Measurement precision
If transmitted electron beam images are acquired to observe three-dimensional internal structure, then depth of focus is improved, but complex specimen preparation and handling are required
Solution Approach 1:
The specimen is mounted on the detecting element before entering the electron microscope. The detecting element is pre-positioned on the specimen base in a state that allows both optical and electron microscopic observation, eliminating the need for complex post-preparation steps such as mounting on mesh grids after sectioning
Solution Approach 2:
The detecting element automatically performs both light detection and charged particle detection functions. The same detecting element that captures optical images also detects transmitted electrons, eliminating the need for separate detection systems and reducing operational complexity
3Measurement precision
If a specimen mounted on slide glass is to be observed with electron microscope, then three-dimensional structure can be observed, but the specimen cannot be directly put into TEM or STEM device
Solution Approach 1:
The specimen base with detecting element serves as a universal platform compatible with both optical microscopes (where specimens are typically mounted) and electron microscopes. This allows specimens to be transferred directly from optical to electron microscope observation without intermediate preparation steps
Solution Approach 2:
The detecting element acts as an intermediary between the specimen and the detection systems of both optical and electron microscopes. It mediates the interaction by detecting both photons and charged particles, enabling seamless transition between observation modes without specimen manipulation
4Measurement precision
If specimen is rotated at multiple angles to acquire three-dimensional information, then three-dimensional positional arrangement can be found, but the observation process becomes more complex
Solution Approach 1:
The specimen base is designed with rotation capability that allows dynamic adjustment of the specimen orientation at multiple angles. This dynamic positioning system enables acquisition of images from different perspectives to reconstruct three-dimensional structures, while the automated rotation control simplifies the observation process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and simplified three-dimensional internal structure observation of specimens by allowing the detection of charged particle beams at different angles, overcoming the limitations of optical microscopes and simplifying the transition between optical and electron microscope observations.
Implementation Method 1
a detecting element that detects a charged particle scattered or transmitted inside the specimen
Implementation Method 2
a specimen base that converts charged particle beams into light for detection
Data Source
AI summary
Provided is a charged particle beam device including a charged particle optical column that irradiates a specimen with a primary charged particle beam, and a specimen base rotating unit that is capable of rotating the specimen base in a state of an angle formed by a surface of the specimen base and an optical axis of the primary charged particle beam being inclined to a non-perpendicular angle, in which the specimen base is configured to include a detecting element that detects a charged particle scattered or transmitted inside the specimen, and transmitted charged particle images of the specimen corresponding to each angle is acquired by irradiating the specimen in a state of the specimen base rotating unit being rotated at a plurality of different angles.