Charged Particle Detection Apparatus Simultaneous Dual-Charge Separation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current detection apparatuses in charged particle beam devices require separate scans for negatively and positively charged secondary particles, leading to inefficiencies and lack of correlation between the information gathered from both types, which limits the effectiveness and throughput of sample inspection or imaging.
Innovation Solution
A detection apparatus and method that utilize a separation field to simultaneously detect both negatively and positively charged secondary particles using separate detectors, allowing for simultaneous extraction and correlation of information from both types of particles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If separate scans are used for negatively and positively charged secondary particles, then detection of each particle type can be performed, but inspection efficiency is reduced and correlation between particle types is lost
Solution Approach 1:
The detection system is segmented into multiple detectors (first detector for positively charged particles, second detector for negatively charged particles) with a separation field generating portion that spatially separates the particle types. This segmentation enables simultaneous detection of both particle types without interference, resolving the contradiction by allowing parallel operation rather than sequential scanning.
Solution Approach 2:
The invention transitions from temporal separation (sequential scanning in time) to spatial separation (simultaneous detection in different spatial zones). By introducing a separation field that divides the detection space into regions for different charge types, the system achieves simultaneous detection across multiple dimensions, thereby improving productivity without proportionally increasing complexity.
2Productivity
If simultaneous detection of both particle types is implemented, then inspection throughput increases, but device complexity increases due to multiple detectors and separation field
Solution Approach 1:
The detection apparatus is designed as a multi-functional system where the first and second detectors, along with the separation field generating portion, work together as an integrated unit. This universal design allows the system to detect both positively and negatively charged particles simultaneously through a coordinated mechanism, achieving high throughput while managing complexity through functional integration rather than independent components.
3Loss of information
If separate detection methods are used for different charged particles, then each particle type can be detected with optimized settings, but correlation between detected information and sample positions is lost
Solution Approach 1:
The separation field is generated in advance to pre-separate positively and negatively charged particles into distinct spatial paths before they reach the detectors. This preliminary spatial separation ensures that each detector receives only its designated particle type, maintaining perfect correlation between detected signals and sample positions without requiring complex post-processing or coordination during detection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the quality and efficiency of sample inspection or imaging by providing simultaneous and correlated information from both negatively and positively charged secondary particles, improving resolution and throughput while reducing the need for multiple scans.
Implementation Method 1
a separation field generating portion adapted to generate a separation field separating positively and negatively charged secondary particles
Data Source
AI summary
A detection apparatus for use in a charged particle beam device is provided. The detection apparatus includes a separation field generating portion adapted to generate a separation field separating positively and negatively charged secondary particles, at least one first detector for detecting positively charged particles, at least one second detector for detecting negatively charged particles, wherein the detection apparatus is adapted to simultaneously detect the positively charged secondary particles in the at least one first detector and the negatively charged secondary particles in the at least one second detector. Further, a method of simultaneously detecting negatively and positively charged particles is provided. The method includes providing a separation field, providing at least one first detector and at least one second detector, separating the negatively charged particles from the positively charged particles in the separation field, simultaneously detecting positively charged particles with the at least one first detector and negatively charged particles with the at least one second detector.