Charged Particle Detector Scintillator Light Emission Stability

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Solution Overview

Problem

Scintillators with InGaN and GaN quantum well layers face challenges in maintaining stable light emission intensity across varying electron energies, affecting detection sensitivity and reproducibility in semiconductor device measurements.

Innovation Solution

A charged particle detector with a scintillator structure featuring alternately laminated Ga1-x-yAlxInyN and GaN light-emitting layers, along with a non-light-emitting GaN layer interposed between them, to stabilize light emission intensity regardless of electron energy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If a scintillator with InGaN/GaN quantum well layer is used, then light emission intensity increases with electron energy, but light emission intensity becomes unstable when electron energy varies

Engineering Contradiction:
Improvelight emission intensityVSAvoidlight emission stability
Core Design Contradiction:
Illumination intensityVSStability of the object's composition

Solution Approach 1:

The scintillator is divided into multiple light-emitting layers with different quantum well structures. Each layer is optimized to respond to different electron energy ranges, thereby stabilizing the overall light emission intensity across varying electron energies by segmenting the response characteristics.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the scintillator (different light-emitting layers) are given different local qualities through varying quantum well compositions and structures. This allows each layer to have optimized light emission characteristics for specific electron energy ranges, resolving the contradiction between intensity and stability.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If high detection sensitivity is achieved by detecting electrons with various energies, then detection sensitivity improves, but measurement reproducibility deteriorates due to light emission intensity variations

Engineering Contradiction:
Improvedetection sensitivityVSAvoidmeasurement reproducibility
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The scintillator is segmented into multiple light-emitting layers, each optimized for different electron energy ranges. This segmentation allows the detector to maintain high sensitivity across various electron energies while improving measurement reproducibility by stabilizing the light emission intensity through the combined response of multiple layers.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration achieves stable and high light emission intensity across a wide range of electron energies, enhancing detection sensitivity and measurement reproducibility, particularly in low-acceleration energy ranges.

Implementation Method 1

a scintillator that includes a light-emitting body including an InGaN/GaN quantum well layer

Methodology Applied
Scientific EffectScintillation: Scintillation

Implementation Method 2

Light generated by the scintillator due to collision of the electrons

Methodology Applied
Scientific EffectCathodoluminescence: Cathodoluminescence

Implementation Method 3

a first light-emitting part in which a layer containing Ga1-x-yAlxInyN is provided directly below the conductive layer and a second light-emitting part in which a layer containing Ga1-x-yAlxInyN is provided directly below the conductive layer

Methodology Applied
Scientific EffectQuantum well emission:

Data Source

PatentUS10984979B2Charged particle detector and charged particle beam apparatus
Publication Date: 2021.04.20 HITACHI HIGH TECH CORP
  • US10984979B2 patent drawing
  • US10984979B2 patent drawing
  • US10984979B2 patent drawing

AI summary

The disclosure provides a charged particle detector including a scintillator that emits light with stable intensity and obtains high light emission intensity regardless of an energy of an incident electron. The disclosure provides the charged particle detector including: a first light-emitting part (21) in which a layer containing Ga1-x-yAlxInyN (where 0≤x<1, 0≤y<1) and a layer containing GaN are alternately laminated; a second light-emitting part (23) in which the layer containing Ga1-x-yAlxInyN (where 0≤x<1, 0≤y<1) and the layer containing GaN are alternately laminated; and a non-light-emitting part (22) that is interposed between the first light-emitting part (21) and the second light-emitting part (23) (see FIG. 2).