Charged Particle Gun Lock Nut for Beam Angle Stability
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Solution Overview
Problem
The inclination angle of the charged particle beam's irradiation axis with respect to the sample significantly affects the performance of charged particle beam systems, such as scanning electron microscopes. In systems where a charged particle source is held by a nut, external forces like vibrations can cause the screw thread section of the nut hole to loosen, leading to changes in the inclination angle of the charged particle source.
Innovation Solution
A charged particle gun is designed with a nut that includes a screw thread section, an inclination adjustment section, and a lock section. The inclination adjustment section allows for the adjustment of the charged particle source's inclination angle by using an inclination adjustment screw that presses the nut seat surface, while the lock section prevents loosening of the nut and bolt connection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a nut is used to hold the charged particle source, then the charged particle source can be securely mounted, but the screw thread section may loosen due to external forces such as vibration, causing changes in inclination angle
Solution Approach 1:
The nut is divided into distinct functional sections: a screw thread section for securing the bolt connection, and a non-screw thread section with larger inner diameter that allows inclination adjustment. This segmentation enables independent optimization of each function - the screw thread section provides secure mounting while the non-screw thread section permits inclination angle adjustment without affecting the bolt connection stability.
Solution Approach 2:
The nut is designed to transition from a fixed state (when holding the charged particle source at a predetermined inclination angle) to an adjustable state (when the inclination angle needs to be changed). The inclined surface and adjustment mechanism enable dynamic repositioning of the charged particle source while maintaining secure bolt connection throughout the process.
2Adaptability or versatility
If the inner diameter of the nut is increased to allow inclination adjustment, then the charged particle source can be repositioned, but the screw thread engagement may become insufficient
Solution Approach 1:
The nut is divided into distinct functional sections: a screw thread section for securing the bolt connection, and a non-screw thread section with larger inner diameter that allows inclination adjustment. This segmentation enables independent optimization of each function - the screw thread section provides secure mounting while the non-screw thread section permits inclination angle adjustment without affecting the bolt connection stability.
3Measurement precision
If the inclination angle is made adjustable, then the charged particle beam system performance can be optimized, but the structure becomes more complex
Solution Approach 1:
The nut incorporates an inclined surface specifically at the bottom of the non-screw thread section, creating a localized adjustment mechanism. This localized inclination feature allows precise control of the charged particle source angle without requiring complex adjustment mechanisms throughout the entire nut structure, thereby achieving measurement precision improvement with minimal increase in device complexity.
Data Source
AI summary
This charged particle gun has a bolt to which a charged particle source is attached, a nut that is screwed together with the bolt and thereby holds the charged particle source, and a nut seat surface in contact with the nut. The nut includes an inclination adjustment section whereby it is possible to adjust the angle of inclination of the charged particle source with respect to the nut seat surface, and a lock section that inhibits the nut and the bolt from becoming loose when screwed together. The inner surface of the nut has a screw thread section and a non-screw thread section with a larger inner diameter than the screw thread section. The inclination adjustment section has: a first slit formed so as to pass through an area from one part of the outer surface of the nut to one part of the non-screw thread section; an inclination adjustment screw; a first part positioned between the first slit and a second surface; a second part positioned between the first slit and a first surface; and a first screw hole that is screwed together with the inclination adjustment screw and formed so as to pass through an area from the first surface to the first slit in the second part.