Charged Particle Microscopy Phase Mapping with HSV Hue Intervals
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Solution Overview
Problem
Interpreting phase information in charged particle microscopy is challenging due to the difficulty in combining and assigning meaningful color hues to different phases in elemental mapping, making it time-consuming and difficult to identify relevant regions in sample analysis.
Innovation Solution
A method using a charged particle microscope that scans a sample with a charged particle beam, detects emissions, and assigns color hues based on spectral information within the HSV color space, selecting hues from a pre-defined range to create a consistent and legible image representation by ensuring equal hue interval angles between colors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If multiple phases are assigned different color hues in elemental mapping, then phase information is provided in the image, but selecting and assigning colors meaningfully and consistently is difficult and time-consuming
Solution Approach 1:
The patent changes the parameter of color hue assignment from manual selection to automated selection based on spectral information. The control unit automatically assigns hues from a pre-selected range to different phases by analyzing spectral data, transforming the color assignment process from a manual parameter-setting task to an automated data-driven process.
Solution Approach 2:
The system performs self-service by automatically selecting and assigning color hues to phases without requiring manual user input. The control unit independently analyzes the spectral information and assigns colors meaningfully and consistently, making the system self-sufficient in the color assignment task.
2Loss of information
If multiple colored images are provided for different phases, then complete phase information is available, but interpretation by the user becomes relatively difficult
Solution Approach 1:
The patent merges multiple phase-specific color images into a single composite image where different phases are represented by different color hues within the same visual field. This combining of previously separate images into one integrated representation makes it easier for users to interpret phase information without having to switch between multiple images.
Solution Approach 2:
The patent uses color changes as a visual encoding mechanism to represent different phases. By assigning distinct color hues to different phases based on their spectral characteristics, the system transforms abstract spectral data into intuitive visual information that is easy to interpret at a glance.
3Measurement precision
If color hues are assigned to different phases, then phase differentiation is achieved, but ensuring meaningful and consistent color selection is difficult
Solution Approach 1:
The patent performs preliminary action by pre-selecting a range of consecutive color hues before the actual phase assignment process. This pre-selection creates a standardized color palette that ensures meaningful and consistent color differentiation, eliminating the need for complex ad-hoc color selection during analysis.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the creation of informative, visually pleasing, and easily interpretable color images that clearly differentiate phases, enhancing the legibility and consistency of sample analysis results.
Implementation Method 1
Irradiation of a specimen by a scanning electron beam precipitates emanation of 'auxiliary' radiation from the specimen, in the form of secondary electrons, backscattered electrons, X-rays and cathodoluminescence (infrared, visible and/or ultraviolet photons)
Implementation Method 2
backscattered electrons are detected by a solid state detector in which each backscattered electron is amplified as it creates many electron-hole pairs in a semiconductor detector
Data Source
AI summary
The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample, and scanning said charged particle beam over said sample. A first detector is used for detecting emissions of a first type from the sample in response to the beam scanned over the sample. Using spectral information of detected emissions of the first type, a plurality of mutually different phases are assigned to said sample. An image representation of said sample is provided, wherein said image representation contains different color hues. The color hues are selected from a pre-selected range of consecutive color hues in such a way that the selected color hues comprise mutually corresponding intervals within said pre-selected range of consecutive color hues.