Charged Particle Optical Column Acceleration Voltage Selection
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Solution Overview
Problem
Conventional inspection and measurement technologies for 3D structure devices face challenges in observing the bottom of holes or trenches due to increased aspect ratios, requiring high acceleration voltages and resulting in complex measurement conditions that are time-consuming and prone to human error.
Innovation Solution
A sample observation device that includes a charged particle optical column for irradiating samples with charged particle beams at varying acceleration voltages, an image acquisition system, and a memory that stores relationships between brightness ratios and sample structures, allowing for the determination of optimal measurement conditions without human intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If high acceleration voltage is used to observe the bottom of holes with large aspect ratios, then observation capability is improved, but measurement condition determination becomes complex and time-consuming
Solution Approach 1:
The system pre-calculates and stores optimal measurement conditions (acceleration voltages) in a lookup table based on aspect ratios before actual measurement. When measuring a hole, the operator only needs to input the aspect ratio, and the system automatically retrieves the corresponding acceleration voltage, eliminating the need for time-consuming manual optimization and reducing determination time while maintaining observation capability.
Solution Approach 2:
The patent introduces an intermediate parameter (aspect ratio) that mediates between the complex measurement conditions and observation capability. By using the aspect ratio as a key to lookup pre-determined optimal acceleration voltages, the system simplifies the relationship between measurement parameters and observation quality, making the process efficient and systematic.
2Measurement precision
If high acceleration voltage is used to observe the bottom of holes with large aspect ratios, then observation capability is improved, but determination of optimal measurement condition becomes prone to human error
Solution Approach 1:
The system establishes a feedback mechanism where measurement results are used to validate and refine the lookup table of optimal conditions. By comparing actual measurement outcomes with expected results based on aspect ratio, the system can automatically adjust and improve the stored acceleration voltage values, reducing human error and increasing determination accuracy over time.
Solution Approach 2:
The system performs self-optimization by automatically determining the best measurement conditions based on pre-stored data and actual measurement feedback, without requiring manual intervention or expert judgment. This automated self-service approach eliminates human factors that cause variation and error in condition determination.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces the time required to determine optimal measurement conditions and minimizes variations caused by human factors, enabling more accurate and efficient observation of 3D structure devices.
Implementation Method 1
a charged particle optical column for irradiating a sample with charged particle beams at a first acceleration voltage
Data Source
AI summary
A sample observation device of the invention includes: a charged particle optical column for irradiating a sample with charged particle beams at a first acceleration voltage, the sample having a target part to be observed which is a concave part; an image acquisition part for acquiring an image including the target part to be observed on the basis of signals obtained by irradiation with the charged particle beams; a memory part for memorizing in advance, at each of a plurality of acceleration voltages, information indicating a relationship between a brightness ratio of a concave part to a periphery part of the concave part in a standard sample and a value indicating a structure of the concave part in the standard sample; and an operation part for obtaining a brightness ratio of the concave part to a periphery part of the concave part in the image. The operation part judges appropriateness/inappropriateness of the first acceleration voltage with the use of the information indicating the relationship and the brightness ratio in the image.