ChemFET Array Pixel Design for DNA Sequencing

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Solution Overview

Problem

Conventional ISFET arrays face limitations in pixel size, signal linearity, and throughput for large-scale DNA sequencing, with existing technologies requiring complex decoder approaches and sensitive to fabrication issues like trapped charge and porous passivation layers, which hinder accurate and efficient analyte detection and measurement.

Innovation Solution

The development of a CMOS-fabricated chemFET array with reduced pixel size, increased density, and improved signal-to-noise ratio, utilizing a simplified pixel design with fewer components and a more stable passivation layer, enabling high-speed analyte detection and measurement across a limited pH range, and integration with microfluidics for efficient chemical sample delivery and processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If conventional ISFET arrays are used for DNA sequencing, then analyte detection capability is provided, but pixel size is large and array density is low

Engineering Contradiction:
Improvearray densityVSAvoidpixel size
Core Design Contradiction:
Quantity of substanceVSArea of moving object

Solution Approach 1:

The pixel design is segmented into essential components only, removing non-critical elements. Each pixel contains a chemFET sensor element with minimal surrounding circuitry, allowing tighter packing. The array is divided into independently addressable pixel groups that can be read out efficiently, enabling high-density integration while maintaining individual pixel functionality for analyte detection.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from conventional two-dimensional array layouts to a more efficient spatial arrangement that utilizes available substrate area more effectively. By optimizing the geometric configuration and inter-pixel spacing in multiple dimensions, the design achieves higher pixel density without compromising sensor performance or signal integrity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Ease of operation

If complex decoder approaches are used in ISFET arrays, then pixel addressing capability is improved, but device complexity increases

Engineering Contradiction:
Improvepixel addressing capabilityVSAvoiddecoder complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The complex decoder functionality is extracted from the array core and implemented using external or integrated circuitry that is not part of the pixel matrix itself. This separation allows the pixel array to maintain a simple, regular structure optimized for sensing, while addressing and control functions are handled by dedicated logic circuits that can be configured flexibly without affecting pixel density or layout.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

An intermediary control layer is introduced between the pixel array and the readout electronics. This intermediary layer provides a simplified interface that translates between the simple pixel structure and the complex addressing requirements, reducing the burden on both the pixel design and the decoder complexity while maintaining full addressing capability.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If porous passivation layers are used in ISFETs, then fabrication is simplified, but measurement accuracy deteriorates due to trapped charge

Engineering Contradiction:
Improvefabrication simplicityVSAvoidmeasurement accuracy
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The passivation layer parameters are optimized by adjusting deposition conditions, thickness, and material composition to reduce porosity while maintaining fabrication compatibility. By carefully controlling the physical and chemical parameters of the passivation layer formation process, the design achieves lower trapped charge density without significantly increasing fabrication complexity, thereby improving measurement accuracy.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

A composite passivation structure is employed that combines multiple materials or layers with complementary properties. The composite design provides both the fabrication simplicity of porous structures and the electrical stability of dense layers, achieving a balance between ease of manufacture and measurement precision by leveraging the advantages of different materials.

Inventive Principle:
Principle #40Composite materials

4Productivity

If large scale FET arrays are fabricated, then throughput for DNA sequencing is improved, but signal-to-noise ratio deteriorates

Engineering Contradiction:
ImprovethroughputVSAvoidsignal-to-noise ratio
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The design uses identical, replicated pixel units across the large-scale array, each optimized for high signal-to-noise performance. By copying a well-characterized, high-performance pixel design throughout the array, the system achieves high throughput through parallel processing while maintaining consistent, high-quality signals from each element. The uniformity of copied pixels also simplifies calibration and data analysis.

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables the creation of very large scale chemFET arrays with increased pixel density and improved measurement accuracy, facilitating rapid and efficient DNA sequencing and analyte detection, while mitigating fabrication-related issues and reducing operational complexity.

Implementation Method 1

a chemically-sensitive passivation layer deposited over the chemFET sensor element

Methodology Applied
Scientific EffectChemical sensing:

Implementation Method 2

chemically-sensitive field effect transistor (chemFET) sensor element

Methodology Applied
Scientific EffectField effect transistor sensing:

Data Source

PatentUS11339430B2Methods and apparatus for measuring analytes using large scale FET arrays
Publication Date: 2022.05.24 LIFE TECHNOLOGIES CORP
  • US11339430B2 patent drawing
  • US11339430B2 patent drawing
  • US11339430B2 patent drawing

AI summary

Methods and apparatus relating to very large scale FET arrays for analyte measurements. ChemFET (e.g., ISFET) arrays may be fabricated using conventional CMOS processing techniques based on improved FET pixel and array designs that increase measurement sensitivity and accuracy, and at the same time facilitate significantly small pixel sizes and dense arrays. Improved array control techniques provide for rapid data acquisition from large and dense arrays. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in a wide variety of chemical and/or biological processes. In one example, chemFET arrays facilitate DNA sequencing techniques based on monitoring changes in hydrogen ion concentration (pH), changes in other analyte concentration, and/or binding events associated with chemical processes relating to DNA synthesis.