Chemical Container Head Portion Welding for Pressure Resistance

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Solution Overview

Problem

Chemical containers with separate body and cap portions suffer from gas leakage issues due to limited internal pressure handling, which affects the transmission of liquid chemicals in semiconductor manufacturing, while integral containers are costly to produce.

Innovation Solution

A chemical container design featuring a head portion with a top wall, head sidewall, and outer edge wall forming a groove for leak collection, along with bulges and connecting holes for pipeline passage, allowing for higher internal pressure without leakage, and a method involving welding of the head and body portions to form a closed chamber.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a chemical container uses a separate body portion and cap portion structure, then the manufacturing cost is reduced and assembly is simplified, but gas leakage occurs at the connection between portions when internal pressure reaches 10 psi or higher

Engineering Contradiction:
Improvemanufacturing costVSAvoidgas leakage
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The container is divided into a body portion and a cap portion that can be separately manufactured and then assembled together. The body portion includes a cylindrical body with a bottom, while the cap portion includes a cap with a top wall having a mouth structure. This segmentation allows for easier manufacturing and assembly while maintaining reliability through proper sealing design at the connection interface.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A sealing structure is introduced as an intermediary element between the body portion and cap portion to prevent gas leakage. The sealing structure includes a sealing ring that fits into a sealing groove formed at the connection interface, creating a reliable seal that can withstand internal pressures of 10 psi or higher without allowing nitrogen gas to leak.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If nitrogen pressure is increased to ensure sufficient liquid chemical supply at the pump inlet, then transmission reliability is improved, but gas leakage from the container connection increases

Engineering Contradiction:
Improveliquid chemical supplyVSAvoidgas leakage
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The sealing ring acts as an intermediary that allows high nitrogen pressure to be maintained for reliable liquid chemical supply while preventing the nitrogen gas from leaking at the connection between the body and cap portions. The sealing groove and sealing ring create a pressure-resistant seal that maintains system integrity even at 10 psi or higher internal pressures.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If an integral container structure is used, then gas leakage is eliminated, but manufacturing cost increases significantly due to special mold requirements

Engineering Contradiction:
Improvegas leakage preventionVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

Instead of using an expensive integral structure requiring special molds, the container is segmented into a body portion and a cap portion that can be manufactured using standard molding processes. The body portion and cap portion are then assembled together with a sealing structure, achieving gas leakage prevention comparable to integral containers while significantly reducing manufacturing costs and mold complexity.

Inventive Principle:
Principle #1Segmentation

4Ease of manufacture

If the container connection structure is simplified for easy assembly, then manufacturing efficiency is improved, but the ability to withstand internal pressure without leakage is reduced

Engineering Contradiction:
Improveassembly efficiencyVSAvoidpressure resistance
Core Design Contradiction:
Ease of manufactureVSStrength

Solution Approach 1:

The sealing ring serves as a simple intermediary component that can be easily assembled into the sealing groove, maintaining assembly efficiency. Despite its simple design, the sealing ring provides robust pressure resistance, enabling the container to withstand internal pressures of 10 psi or higher without leakage, thus balancing ease of assembly with pressure resistance capability.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design enables the chemical container to withstand higher internal pressures without gas leakage, reduces manufacturing costs, and facilitates easy collection and monitoring of leaks, ensuring the purity and safety of the liquid chemicals.

Implementation Method 1

a method involving welding of the head and body portions to form a closed chamber

Methodology Applied
Scientific EffectWelding: Welding

Data Source

PatentUS10766665B2Method for manufacturing a chemical container
Publication Date: 2020.09.08 WUXI HUAYING MICROELECTRONICS TECH CO LTD
  • US10766665B2 patent drawing
  • US10766665B2 patent drawing
  • US10766665B2 patent drawing

AI summary

The present disclosure provides a chemical container and a method for manufacturing the same. The chemical container comprises a head portion having a top wall and a head sidewall extending from an edge of the top wall, as well as a body portion jointed with the head portion and defining a chamber together with the head portion. The top wall has a mouth structure configured for one or more pipelines to pass through and connect with the chamber. The manufacturing method is simple and of low cost, and the resulted chemical container is able to withstand a greater internal pressure and is configured to collect any leaking liquid chemicals.