Chemical Liquid Discharge Mechanism Vortex Dilution
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Solution Overview
Problem
Chemical liquid discharge mechanisms face challenges in miniaturizing semiconductor manufacturing equipment due to the need for increased height in liquid discharge pipes to handle high-viscosity chemicals, which also leads to inefficiencies in waste liquid management.
Innovation Solution
A chemical liquid discharge mechanism that reduces viscosity by forming vortex flows using a diluent and gas supply, allowing for efficient discharge without the need for large pipe inclinations, featuring a storage space with tangential diluent and gas supply ports and a collision member to handle agglomerates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the liquid discharge pipe is installed at a relatively large angle to ensure high-viscosity chemical liquid flows, then the chemical liquid can flow efficiently, but the height occupied by the liquid discharge pipe is increased, making it difficult to miniaturize the coating apparatus
Solution Approach 1:
The patent changes the physical state of the chemical liquid by introducing a diluent, transforming it from a high-viscosity state to a low-viscosity state. This parameter change (viscosity reduction) allows the liquid to flow efficiently through pipes with smaller inclination angles, thereby reducing the height requirement of the discharge pipe while maintaining flow efficiency
Solution Approach 2:
The patent introduces a diluent as an intermediary substance that mediates between the high-viscosity chemical liquid and the discharge pipe system. The diluent mixes with the chemical liquid to reduce its viscosity, enabling the liquid to flow through the pipe without requiring a large inclination angle, thus solving the contradiction between flow efficiency and pipe height
2Productivity
If the liquid discharge pipe height is increased to handle high-viscosity chemicals, then the chemical liquid can be discharged, but the coating apparatus cannot be miniaturized
Solution Approach 1:
By changing the viscosity parameter of the chemical liquid through diluent addition, the patent enables effective discharge through compact piping arrangements. This parameter modification allows the apparatus to maintain discharge capability while reducing overall volume and enabling miniaturization
Solution Approach 2:
The patent transitions from relying on gravitational flow (one-dimensional vertical discharge) to a mixed approach where diluent injection creates fluid dynamic effects. This dimensional change in the discharge mechanism allows for more flexible piping configurations that reduce apparatus height and volume
3Productivity
If a valve is installed in the pipe to discharge mixing-target materials, then the materials can be discharged by opening/closing the valve, but burdens in opening/closing the valve and manufacturing costs increase
Solution Approach 1:
The patent extracts and removes the valve component from the discharge system. Instead of using a valve to control discharge, the system relies on the fluid dynamic effects created by diluent injection and vortex formation to achieve automatic discharge control, thereby eliminating the complexity and costs associated with valve installation and operation
Solution Approach 2:
The discharge system becomes self-regulating through the injection of diluent that creates vortex flows. The system automatically controls the discharge process through fluid dynamic mechanisms rather than requiring external valve operation, reducing operational burdens and device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces the height of the liquid discharge path, enabling miniaturization of equipment and improving the efficiency of chemical liquid discharge while maintaining fluidity and preventing clogging.
Implementation Method 1
a diluent supply port opened so as to supply a diluent for reducing a viscosity of the chemical liquid to the storage space
Implementation Method 2
a vertex flow forming portion configured to form vortex flows in the diluent and the chemical liquid by supplying a fluid to the storage space so as to stir the diluent and the chemical liquid
Data Source
AI summary
Disclosed is a chemical liquid discharge mechanism. The mechanism includes: a storage portion including a chemical liquid storage space; a diluent supply port opened to supply a diluent for reducing a viscosity of the chemical liquid to the storage space; a vertex flow forming portion that forms vortex flows in the diluent and the chemical liquid by supplying a fluid to the storage space to stir the diluent and the chemical liquid; and a liquid discharge port opened to an upper side of the diluent supply port in the storage space such that, by the supply of the diluent, the diluent and the chemical liquid flow into the liquid discharge port to be discharged from the storage space. Thus, the viscosity of the waste liquid discharged from the liquid discharge port may be reduced, and thus, it is not necessary to largely set the inclination of the liquid discharge path.