Chemical Drum Alignment Module for Safer Semiconductor Supply
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Solution Overview
Problem
The semiconductor industry faces challenges in safely and efficiently replacing chemical storage containers in semiconductor fabrication plants due to the complexity and potential hazards associated with flammable, toxic, and corrosive chemicals used in manufacturing processes.
Innovation Solution
A chemical liquid supply equipment with a casing, connection module, and chemical drum rotating and conveying module that automatically aligns and connects with chemical drums, reducing the required length and rotational angle of pipelines, and includes guiding plates and power/idler rollers for precise alignment and movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual replacement of chemical storage containers is used, then operational flexibility is maintained, but safety risks increase and productivity decreases
Solution Approach 1:
The system enables automatic chemical drum replacement where the supply equipment autonomously identifies, aligns with, and replaces chemical drums without manual intervention. The control unit coordinates the rotating and conveying module to perform self-service operations, improving safety by eliminating human exposure to hazardous chemicals while maintaining continuous operation.
Solution Approach 2:
The patent replaces manual mechanical operations with an automated mechanical system. The rotating and conveying module, driven by power rollers and controlled by a control unit, substitutes human labor in the physical handling and replacement of chemical drums, thereby enhancing safety and productivity.
2Reliability
If complex connection processes are used, then connection reliability is improved, but device complexity and operation difficulty increase
Solution Approach 1:
The system performs preliminary alignment actions before connection. The rotating and conveying module pre-positions the chemical drum in the correct orientation and location, ensuring that connection interfaces are properly aligned before the actual connection occurs. This preliminary positioning simplifies the connection process while maintaining reliability.
Solution Approach 2:
The guiding plate serves as an intermediary element that facilitates the alignment between the chemical drum and the supply equipment. It guides the drum into the correct position and orientation, mediating the connection process and reducing complexity by providing a straightforward alignment mechanism.
3Manufacturing precision
If precise alignment mechanisms are added, then chemical liquid supply precision is improved, but device complexity increases
Solution Approach 1:
The chemical drum is designed with a cylindrical (spheroidal) shape that naturally facilitates rotation and alignment. This curved geometry allows the drum to be easily rotated to the correct orientation by the power rollers and conveyed to the precise position needed for connection, achieving alignment precision without complex mechanical guidance mechanisms.
Solution Approach 2:
The system employs power rollers that likely utilize pneumatic or hydraulic actuation to rotate and convey the chemical drum. This approach achieves precise positioning and alignment through controlled fluid pressure, providing accurate alignment with simpler mechanical structures compared to traditional mechanical positioning systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances safety and convenience in replacing chemical storage containers, improves the efficiency and precision of chemical liquid supply, and reduces the complexity of the connection process, thereby enhancing the overall safety and yield of semiconductor fabrication plants.
Implementation Method 1
a plurality of first power rollers, a plurality of first idler rollers, a plurality of second power rollers and a plurality of second idler rollers
Data Source
AI summary
A chemical liquid supply equipment includes a casing, a connection module and a chemical drum rotating and conveying module. The casing has a chemical drum accommodating room, the connection module is installed in the chemical drum accommodating room of the casing, and the chemical drum rotating and conveying module is also installed in the chemical drum accommodating room of the casing to transport a chemical drum into the chemical drum accommodating room, and the chemical drum is rotated to align with the connecting module.