Chemical Exchange Method for Liquid Treating Device Tanks
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Solution Overview
Problem
The existing chemical supply systems face challenges in maintaining consistent chemical concentrations during the replacement of chemicals that have reached their life time, leading to fluctuations in process performance and stability.
Innovation Solution
A chemical exchange method and apparatus that involves a flushing operation to drain and circulate a flushing chemical through multiple tanks, followed by a liquid exchange operation to introduce a new chemical, ensuring that the concentration of the new chemical remains stable and consistent.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If liquid exchange is performed by simply replacing chemical in storage tank with new chemical, then chemical replacement is completed quickly, but concentration fluctuations occur when new chemical mixes with remaining chemical in tank and circulation line
Solution Approach 1:
The system performs a flushing operation before the actual liquid exchange to remove residual chemical from the circulation line and storage tank. This preliminary action ensures that when new chemical is introduced, it does not mix with old chemical, thereby preventing concentration fluctuations while maintaining efficient replacement speed.
Solution Approach 2:
The chemical replacement process is divided into two distinct segments: (1) flushing operation to clear the circulation line and tank, and (2) liquid exchange operation to introduce new chemical. This segmentation prevents mixing of old and new chemical, resolving the contradiction between speed and concentration stability.
2Productivity
If chemical is reused for extended period, then productivity is improved, but chemical concentration deviates from standard and fine particles remain in chemical
Solution Approach 1:
The system monitors chemical concentration and Ti ion levels continuously. When concentration deviation or particle accumulation reaches predetermined thresholds, the system automatically triggers a flushing operation followed by liquid exchange, ensuring chemical precision is maintained while maximizing reuse efficiency.
Solution Approach 2:
The system changes operational parameters (switches from reuse mode to flushing mode to exchange mode) based on monitored chemical conditions. This dynamic parameter adjustment allows extended chemical reuse while maintaining concentration precision through timely intervention.
3Reliability
If flushing operation is performed for longer duration, then residual chemical in tanks and circulation line is minimized, but process time increases
Solution Approach 1:
The flushing operation duration is determined by feedback from sensors monitoring residual chemical levels in the circulation line and tanks. The system continues flushing only until predetermined cleanliness criteria are met, avoiding unnecessary extended flushing while ensuring complete removal of residual chemical.
Solution Approach 2:
The system applies excessive flushing action (flushing longer than minimum required) to ensure complete removal of residual chemical, particularly in hard-to-reach areas of the circulation line. This approach prioritizes exchange completeness over time efficiency, resolving the contradiction by accepting some time loss for guaranteed reliability.
Data Source
AI summary
Disclosed is a chemical exchange method in a liquid treating device including a first tank, a second tank, and a third tank, the method including: a flushing operation of draining chemicals received in the first tank, the second tank, and the third tank, injecting a flushing chemical into each tank and then circulating the flushing chemical, and then draining the flushing chemical; and a liquid exchange operation of supplying a new chemical to at least one of the first tank, the second tank, and the third tank to perform liquid exchange.