Chemical Supply Filter Layout for Safe Replacement and Continuous Flow

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Solution Overview

Problem

Existing chemical solution supply systems face risks of chemical injury due to direct contact with chemical solutions during filter replacement and inadequate monitoring of filter states, leading to potential hazards and inefficiencies in semiconductor manufacturing processes.

Innovation Solution

A chemical solution supply system with dual filter units, including a first filter unit connected to a second chemical solution tank for dilution and a third chemical solution tank for neutralization, along with monitoring units to assess filter states and control valve operations, ensuring safe and efficient chemical solution handling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a filter unit is attached to the pipe to remove foreign matters from chemical solutions, then the purity of the chemical solution is improved, but the risk of chemical injury increases during filter replacement due to adhered chemical solutions

Engineering Contradiction:

Improvepurity of chemical solutionVSAvoidrisk of chemical injury

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

A second pipe is introduced as an intermediary component connecting the second tank to the first pipe between the filter unit and the valve. This intermediary pipe enables the introduction of a second chemical solution that serves as a mediator to dilute and neutralize the first chemical solution, thereby reducing the harmful effects during filter replacement operations

Inventive Principle:

Principle #24Intermediary (Mediator)

2Manufacturing precision

If filter replacement is performed to maintain solution purity, then the manufacturing precision is preserved, but the supply process must be interrupted, reducing productivity

Engineering Contradiction:

Improvesolution purityVSAvoidsupply process continuity

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The second chemical solution is supplied in advance through the second pipe to the first pipe segment between the filter unit and valve. This preliminary action of introducing the neutralizing solution before filter replacement allows the first chemical solution to be diluted and neutralized beforehand, enabling safe filter replacement without interrupting the overall supply process

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system maintains continuous supply operation by introducing the second chemical solution through the parallel second pipe while the first chemical solution continues to flow through the first pipe. This allows the useful action of chemical solution supply to continue uninterrupted while enabling filter maintenance operations

Inventive Principle:

Principle #20Continuity of useful action

3Ease of operation

If the second pipe is connected to the first pipe between the filter unit and the valve to enable solution management, then the ease of operation is improved, but the device complexity increases

Engineering Contradiction:

Improvesolution management capabilityVSAvoidpipe system configuration

Core Design Contradiction:

Ease of operationVSDevice complexity

Solution Approach 1:

The first pipe serves multiple functions: it conveys the first chemical solution from the tank to the filter unit, and also receives the second chemical solution from the second pipe for dilution and neutralization purposes. This multi-functionality reduces the need for completely separate piping systems, thereby limiting the increase in device complexity while improving ease of operation

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Reduces the risk of chemical injury by diluting and neutralizing chemical solutions, allows safe filter replacement, and maintains continuous chemical supply by monitoring and controlling the process, enhancing safety and efficiency in semiconductor manufacturing.

Implementation Method 1

supplying a second chemical solution from a second tank that stores a second chemical solution to the first pipe between the first filter unit and the first valve via the second pipe connected to the second tank and the first pipe between the first filter unit and the first valve

Methodology Applied

Scientific EffectDilution:

Implementation Method 2

monitoring a state of a liquid in the first filter unit; and determining a state of the first filter based on the monitoring

Methodology Applied

Scientific EffectNeutralization reaction:

Data Source

PatentUS12629617B2Chemical solution supply system and chemical solution supply method

Publication Date: 2026.05.19 KIOXIA CORP

AI summary

A chemical solution supply system including: a first tank that stores a first chemical solution; a first pipe that is connected to the first tank and conveys the first chemical solution; a first filter unit that is connected to the first pipe and has a first filter through which the first chemical solution is filtered; a first valve that is provided in the first pipe between the first tank and the first filter unit; a second tank that stores a second chemical solution; and a second pipe that is connected to the second tank and the first pipe between the first filter unit and the first valve.