Chemical Liquid Supply Unit With Selective Flow Rate Control
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Solution Overview
Problem
Existing semiconductor manufacturing processes require multiple chemical liquid supply units to handle different flow rates, leading to an exponential increase in parts and complexity.
Innovation Solution
A chemical liquid supply unit that supplies chemical liquids at the same flow rate to multiple lines, with adjustable flow rates via a flow control valve, allowing different flow rates through selective control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple chemical liquid supply units are disposed to supply chemical liquids of different flow rates, then the requirement for different flow rates is met, but the number of parts increases exponentially
Solution Approach 1:
The patent implements a single chemical liquid supply unit that can perform multiple functions by selectively adjusting flow rates. The supply unit includes a flow control valve that can be adjusted to provide different flow rates (first flow rate, second flow rate, etc.) to the same chemical liquid line, eliminating the need for separate supply units for each flow rate requirement. This makes one unit universal for supplying chemical liquids at various flow rates.
Solution Approach 2:
The patent introduces dynamic adjustability to the chemical liquid supply system through flow control valves that can change their opening degree based on process requirements. The supply unit can dynamically switch between different flow rates (high flow rate, low flow rate, intermediate flow rates) by adjusting the valve opening, allowing the system to adapt to different substrate processing needs without physical reconfiguration.
2Adaptability or versatility
If multiple flow controllers and mixing tanks are disposed for different flow rates, then the flow rate requirements are satisfied, but the complexity of the supply unit increases
Solution Approach 1:
The patent makes a single chemical liquid supply unit universal by equipping it with an adjustable flow control valve. The same supply unit can supply chemical liquids at different flow rates (first flow rate for high volume, second flow rate for low volume, and intermediate rates) by simply adjusting the valve opening degree, eliminating the need for multiple specialized supply units with different controllers and tanks.
Solution Approach 2:
The patent changes the operating parameter (flow rate) of the chemical liquid supply system by adjusting the opening degree of the flow control valve. Instead of using different physical configurations for different flow rates, the system maintains a single configuration and achieves variable flow rates by changing the valve opening parameter, thereby simplifying the supply unit structure.
3Manufacturing precision
If separate supply units are used for high flow rate and low flow rate chemical liquids, then the specific flow rate requirements are met, but the number of components increases
Solution Approach 1:
The patent creates a universal chemical liquid supply unit that can precisely supply chemical liquids at different flow rates (high, low, and intermediate) through a single adjustable flow control valve. The same supply unit and chemical liquid line can be used for all flow rate requirements by simply adjusting the valve opening, eliminating the need for separate supply units for high and low flow rates.
Solution Approach 2:
The patent introduces dynamic flow rate control through an adjustable flow control valve that can be set to different opening degrees to achieve precise flow rates. The system can dynamically switch between high flow rate (larger opening), low flow rate (smaller opening), and intermediate flow rates using the same physical components, maintaining precision while reducing component count.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient supply of chemical liquids at varying flow rates using a single unit, reducing the number of parts and simplifying the process.
Implementation Method 1
a flow control valve configured to adjust a flow rate of the chemical liquid supplied to the second chemical liquid line according to an opening degree of the flow control valve
Data Source
AI summary
Proposed are a chemical liquid supply unit, a substrate processing apparatus having the same, and a chemical liquid supply method. More particularly, proposed is a technique for supplying chemical liquids of different flow rates, in which a chemical liquid is supplied at the same flow rate to each of a plurality of chemical liquid lines and the flow rate of the chemical liquid is adjusted through a flow control valve disposed on at least one chemical liquid line selected among the plurality of chemical liquid lines, so that the plurality of chemical liquid lines can supply chemical liquids at different flow rates.