Chemical Liquid Supply Moving Device Stability
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Solution Overview
Problem
The increased size of substrates for display device manufacturing leads to higher loads on moving members and traveling ways in chemical liquid supply apparatuses, resulting in reduced stability and potential damage, affecting precise chemical liquid distribution.
Innovation Solution
Incorporating load supporting members and absorbing members, such as air bearings and damping members, to maintain a constant distance between moving members and traveling ways, and to absorb impulsive loads, thereby preventing damage and ensuring stable movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the size of the substrate is increased, then the processing capacity is improved, but the load on the moving member and traveling way is increased
Solution Approach 1:
The chemical liquid supply member is divided into multiple independent modules, each with its own moving member. This segmentation distributes the total load across multiple smaller moving members rather than one large moving member, reducing the force burden on each individual component while maintaining the capability to process large substrates.
Solution Approach 2:
The patent introduces a vertical dimension by positioning multiple chemical liquid supply modules at different locations along the traveling way. This spatial arrangement allows parallel processing of different regions of large substrates, improving processing capacity without proportionally increasing the load on any single moving member.
2Productivity
If the load on the moving member is increased, then the processing capacity is improved, but the stability of the moving member is reduced
Solution Approach 1:
By segmenting the chemical liquid supply system into multiple modules, each with its own moving member, the patent reduces the mass and moment of inertia of each moving component. This segmentation maintains processing capacity through parallel operation while improving the stability and positioning accuracy of each individual moving member.
Solution Approach 2:
The patent replaces traditional mechanical support structures with air bearings, substituting mechanical contact with aerodynamic support. This substitution eliminates friction and mechanical wear, significantly improving the stability and precision of the moving member while reducing the impact of load variations on positioning accuracy.
3Productivity
If the load on the traveling way is increased, then the processing capacity is improved, but damages to the moving member and traveling way may occur
Solution Approach 1:
The patent incorporates air bearings between the moving members and the traveling way, creating a cushioning air film that prevents direct mechanical contact. This beforehand cushioning protects both the moving members and the traveling way from damage due to increased loads, while still supporting the necessary weight for processing large substrates.
Solution Approach 2:
The air bearing acts as an intermediary between the moving member and the traveling way, mediating the interaction forces. This intermediary layer distributes and softens the contact forces, preventing concentration of stress that could lead to damage, while maintaining the load-bearing capability needed for high-productivity operation.
4Device complexity
If the chemical liquid supply member is provided as a single module, then the structure is simplified, but the size and weight are increased
Solution Approach 1:
The chemical liquid supply member is segmented into multiple smaller modules, each with reduced weight and size. While this increases the number of components, each module can be independently supported by its own moving member, distributing the total weight burden. The modular design actually simplifies the overall system architecture by creating standardized, interchangeable units.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the stability of moving members and traveling ways, preventing damage and ensuring precise chemical liquid distribution on large substrates by effectively managing loads and impulsive forces.
Implementation Method 1
each of the absorbing members may include an air bearing and a damping member and each of the load supporting members may include an air bearing
Implementation Method 2
The absorbing members may absorb an impulsive load or an impulsive force applied to the moving member and/or the traveling way
Data Source
AI summary
An apparatus for supplying chemical liquid may include a gantry, a chemical liquid supply member providing a chemical liquid onto a substrate, and a moving device supporting the chemical liquid supply member and moving along the gantry. The moving device may include a moving member, load supporting members and absorbing members. The moving member may support one side of the chemical liquid supply member and may run over the gantry. The moving member may cover an upper face, a first side and a second side of the gantry. The load supporting members may support a load applied to the moving member and the gantry while maintaining a substantially constant distance between the moving member and the gantry. The absorbing members may absorb an impulsive load or an impulsive force applied to the moving member and/or the gantry when the moving member deviates from a moving path provided by the gantry.