Chemical Liquid Supply Device Temperature Control via Density Separation
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Solution Overview
Problem
Existing devices for supplying chemical liquids in integrated circuit manufacturing processes face issues with temperature control, as fluids with different specific gravities can leak and mix, leading to process failures.
Innovation Solution
A device with a fluid supplying part and a chemical liquid supplying part, where a monitoring port with a trapping and sensing mechanism ensures heat transfer between fluids of different specific gravities, preventing mixing and maintaining the chemical liquid at a desired temperature by trapping fluids at the top or bottom based on specific gravity differences, and a control part stops the chemical liquid supply when fluid inflow is detected.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a double piping configuration is used to control temperature of chemical liquid, then temperature control is improved, but fluid leakage and mixing between the two lines occurs
Solution Approach 1:
A trapping part is introduced as an intermediary component between the first line (chemical liquid) and second line (fluid). This trapping part acts as a mediator that allows heat transfer between the two fluids while preventing direct mixing, thus maintaining temperature control reliability without compromising the integrity of either fluid stream.
Solution Approach 2:
The trapping part is positioned such that it is surrounded by either the first line or the second line, creating a nested configuration. This nesting arrangement enables thermal interaction between the nested components while maintaining physical separation, allowing temperature control without fluid mixing.
2Manufacturing precision
If heat transfer is generated between fluid and chemical liquid for temperature control, then temperature precision is improved, but fluid mixing occurs causing process failures
Solution Approach 1:
The trapping part serves as a thermal intermediary that facilitates heat transfer between the fluid and chemical liquid while maintaining physical separation. This mediator enables precise temperature control through thermal coupling without allowing harmful fluid mixing that would cause process failures.
Solution Approach 2:
The trapping part functions as a thin-walled structure that allows thermal energy to pass through while preventing mass transfer. The thin wall configuration enables efficient heat transfer for temperature precision while the continuous barrier prevents fluid mixing and associated process failures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device effectively maintains the chemical liquid at a desired temperature, preventing fluid mixing and process failures by using a monitoring and control system to manage fluid inflow, ensuring precise temperature control and process integrity.
Implementation Method 1
a chemical liquid supplying part configured to provide a chemical liquid having a specific gravity different from a specific gravity of the fluid... the fluid is trapped at a top portion or a bottom portion of the trapping part in accordance with a difference between the specific gravity of the fluid and the specific gravity of the chemical liquid
Implementation Method 2
wherein a heat transfer is generated between the fluid and the chemical liquid
Data Source
AI summary
An apparatus for processing a substrate may include a chemical liquid discharging part configured to discharge a chemical liquid having a first specific gravity onto a substrate, a chemical liquid supplying part configured to provide the chemical liquid to the chemical liquid discharging part, a fluid supplying part configured to provide a fluid having a second specific gravity different from the first specific gravity, a chemical liquid supplying part configured to provide a chemical liquid having a second specific gravity different from the first specific gravity, and a monitoring port including a trapping part configured to trap the fluid flowing into the chemical liquid supplying part and a sensing part configured to sense an inflow of the fluid. A heat transfer may be generated between the fluid and the chemical liquid such that the chemical liquid has a desired temperature. The fluid may be trapped at a top portion or a bottom portion of the trapping part in accordance with a difference between the first specific gravity and the second specific gravity.