Chemical Liquid Supply Control for Stable Substrate Treatment Temperature
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Solution Overview
Problem
Existing chemical solution supplying devices struggle to maintain a constant temperature due to frequent replenishment, making it difficult to predict temperature changes in the chemical solution supplied to substrate treating apparatuses.
Innovation Solution
A treating liquid providing unit that includes a storage module, heating module, discharging module, and control module to predict temperature changes by considering inflow and consumption amounts of the substrate treating liquid, with features like inflow amount measuring modules and bypass lines to manage temperature fluctuations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single tank-based chemical solution supplying device is used, then the device complexity is reduced, but the temperature stability of the chemical solution deteriorates due to frequent replenishment
Solution Approach 1:
The single tank is divided into multiple tanks (first tank and second tank) that can be operated independently. This segmentation allows one tank to be replenished while the other continues to supply chemical solution, eliminating frequent interruptions and maintaining temperature stability without requiring a completely complex dual-tank system from the start.
Solution Approach 2:
The system performs preliminary heating of the chemical solution in the tanks before replenishment is needed. By pre-heating the solution and maintaining it at the target temperature, the system avoids temperature fluctuations that would occur during and after replenishment, thus maintaining temperature stability while using a relatively simple tank structure.
2Ease of operation
If chemical solution is frequently replenished in a single tank system, then the replenishment operation is simplified, but the time to reach target temperature increases
Solution Approach 1:
The dual-tank system with switching capability ensures continuous supply of pre-heated chemical solution to the substrate treating apparatus. While one tank is being replenished, the other tank continues to supply hot chemical solution, eliminating downtime and ensuring the useful action of substrate treatment continues without interruption or temperature drop.
Solution Approach 2:
The system pre-heats chemical solution in both tanks before they are needed for supply. This preliminary heating action ensures that when a tank is selected for supply, the chemical solution is already at the target temperature, eliminating the time delay that would otherwise be required to heat the solution after replenishment.
3Device complexity
If a single tank system is used without temperature prediction capability, then the measurement system is simpler, but the ability to predict temperature change is lost
Solution Approach 1:
Temperature sensors are installed in each tank to continuously monitor the chemical solution temperature. This feedback information is sent to the control unit, which uses it to predict temperature changes and automatically adjust the heating elements or switch between tanks to maintain the target temperature, providing temperature prediction capability without excessive system complexity.
Solution Approach 2:
The control unit predicts temperature changes by monitoring the volume and temperature of chemical solution in each tank, and takes preliminary actions (such as activating heating elements or switching tanks) before the temperature actually deviates from the target range. This predictive approach allows temperature management without requiring complex real-time calculation systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively maintains a constant temperature of the substrate treating liquid, reducing the time to reach target temperature and preventing overheating by using inflow and consumption amounts as control factors.
Implementation Method 1
a treating liquid heating module for heating the substrate treating liquid
Data Source
AI summary
Provided are a treating liquid providing unit capable of predicting a temperature change of a substrate treating liquid by adding an inflow amount or consumption amount of the substrate treating liquid as a control factor, and a substrate treating apparatus including the same. The treating liquid providing unit includes a treating liquid storage module for storing the substrate treating liquid, a treating liquid heating module for heating the substrate treating liquid, a treating liquid discharging module for discharging the substrate treating liquid, a treating liquid supplying module for supplying the substrate treating liquid to the treating liquid storage module when the substrate treating liquid is discharged, and a control module for predicting the temperature of the substrate treating liquid remaining in the treating liquid storage module based on the inflow amount of the substrate treating liquid.