Chemical Supply Pump Monitoring for Static Buildup Control
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Solution Overview
Problem
In semiconductor fabrication facilities, the transportation of low-conductivity or high-resistance chemical solutions through insulating pipelines leads to charge separation and static electricity buildup, causing damage to equipment and potential explosions, while existing solutions either introduce metal contamination or fail to effectively control electrostatic discharge.
Innovation Solution
A system and method that incorporates electrostatic probes on pumps and pipelines to continuously measure and monitor static electricity, allowing for real-time adjustments to reduce static electricity generation by tuning parameters such as fluid horsepower and pump operation speed, using insulating materials like PTFE for pipeline construction to minimize contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If insulating pipelines are used to transport chemical solutions, then particle contamination is reduced, but static electricity buildup occurs causing equipment damage and explosion risks
Solution Approach 1:
The patent introduces an intermediary substance (conductive fluid additive) into the chemical solution to modify its electrical properties. This additive acts as a mediator between the insulating pipeline walls and the chemical solution, enabling charge dissipation while maintaining the benefits of insulating pipeline material for contamination control.
Solution Approach 2:
The patent changes the electrical parameters of the chemical solution by adding conductive additives, thereby transforming it from a non-conductive to a slightly conductive state. This parameter change allows the solution to dissipate static charges accumulated in insulating pipelines while still using insulating pipeline materials to prevent particle contamination.
2Reliability
If metal components are used in chemical delivery systems, then electrostatic discharge is controlled, but metal particle contamination occurs
Solution Approach 1:
The patent changes the electrical conductivity parameter of the chemical solution through additive formulation, replacing the need for metal components. This allows the system to achieve electrostatic discharge control through fluid property modification rather than through metal contact, thereby avoiding metal particle contamination.
Solution Approach 2:
The patent replaces the mechanical/electrical approach of using metal components for ESD control with a chemical approach using conductive additives in the fluid. This substitution eliminates the need for metal parts in the delivery system while maintaining electrostatic control through the conductive properties of the modified chemical solution.
3Productivity
If pump operation speed is increased to improve productivity, then chemical solution delivery efficiency is improved, but static electricity generation increases
Solution Approach 1:
The patent modifies the electrical parameters of the chemical solution by adding conductive substances, which changes how the fluid interacts with the pump and pipeline surfaces. This parameter change reduces triboelectric charge generation during pumping, allowing higher operation speeds without proportionally increasing static electricity buildup.
Solution Approach 2:
The patent implements a monitoring and control system that measures static electricity levels and provides feedback to adjust pump operation parameters. When static electricity thresholds are approached, the system can reduce pump speed or adjust other parameters to maintain safe electrostatic levels while optimizing productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively mitigates particle contamination and reduces the risk of explosions by continuously monitoring and controlling static electricity, ensuring safer and more reliable chemical solution delivery in semiconductor processes.
Implementation Method 1
a first electrostatic probe coupled to the pump and configured to measure an electrostatic voltage of the pump
Implementation Method 2
using insulating materials like PTFE for pipeline construction to minimize contamination
Data Source
AI summary
A system includes a chemical storage tank, a pipeline, a pump, a first electrostatic probe, and a control unit. The pipeline is connected to the chemical storage tank. The pump is connected to the pipeline and configured to pump a chemical solution from the chemical storage tank into the pipeline. The first electrostatic probe is coupled to the pump and configured to measure an electrostatic voltage of the pump. The control unit is coupled to the first electrostatic probe and configured to obtain a measurement of an electrostatic voltage from the first electrostatic probe.