Chemical Liquid Receiving Assembly Bubble Removal
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Solution Overview
Problem
Conventional apparatuses for supplying chemical liquids in display device manufacturing fail to effectively remove bubbles and recycle chemical liquids, leading to process failures and increased manufacturing costs.
Innovation Solution
A chemical liquid receiving assembly with a receiving member, inlet ports, flow guiding members, and outlet ports, which includes an introducing space and inclined members to guide the chemical liquid flow along the side surface, effectively removing bubbles and recycling the liquid through a collecting member and recovery line.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional apparatus is used for supplying chemical liquid, then the structure is simple, but bubbles cannot be effectively removed and reliability decreases
Solution Approach 1:
The receiving member is divided into multiple functional regions: an introducing space for initial liquid reception and bubble separation, and a receiving space for storing the chemical liquid. This segmentation allows bubbles to be removed in the introducing space before the liquid enters the main receiving space, thereby improving reliability without requiring a completely new apparatus design.
Solution Approach 2:
The inlet port is positioned at the upper side of the receiving member rather than at the bottom or side, utilizing the vertical dimension for bubble separation. Chemical liquid enters through the upper inlet port and flows downward along the side surface, allowing bubbles to rise and separate from the liquid in the introducing space before the liquid proceeds to the receiving space. This dimensional arrangement enables effective bubble removal while maintaining a relatively simple apparatus structure.
2Loss of substance
If conventional apparatus is used for chemical liquid supply, then the apparatus is easy to operate, but chemical liquid cannot be sufficiently recovered and recycled, increasing manufacturing cost
Solution Approach 1:
The receiving member is designed with a draining port at the bottom of the receiving space, enabling the recovery and recycling of chemical liquid. After the chemical liquid has been used by the supply member, it can be drained back into the receiving member through the draining port for reuse. This recovery mechanism reduces chemical liquid loss and manufacturing costs while maintaining ease of operation, as the draining process is automatically controlled without requiring complex manual intervention.
3Object-affected harmful factors
If conventional apparatus is used, then the structure is simple, but bubble treatment is ineffective and process failures occur frequently
Solution Approach 1:
The introducing space serves as a preliminary treatment zone where bubbles are separated from the chemical liquid before the liquid enters the main receiving space. By performing bubble removal in advance in the introducing space, the harmful effect of bubbles on the supply process is eliminated without requiring complex bubble treatment mechanisms in the main receiving space, thus improving bubble treatment effectiveness while keeping the overall structure relatively simple.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively removes bubbles from the chemical liquid, stabilizes its supply onto the substrate, and efficiently recycles the liquid, reducing manufacturing costs and improving the reliability of display devices.
Implementation Method 1
The inclined member may be fluid communicated with the chemical liquid flow path and may be inclined toward the lower portion of the receiving member
Data Source
AI summary
An apparatus for supplying chemical liquid may include a chemical liquid supply member for supplying a chemical liquid onto a substrate, a chemical liquid storing member for storing the chemical liquid, a chemical liquid receiving assembly for receiving the chemical liquid provided from the chemical liquid storing member and for providing the chemical liquid into the chemical liquid supply member, a first chemical liquid supply line for supplying the chemical liquid from the chemical liquid storing member to the chemical liquid receiving assembly, and a second chemical liquid supply line for supplying the chemical liquid from the chemical liquid receiving assembly to the chemical liquid supply member.