Automatic Chemical Sampling Equipment With Cap Rotation
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Solution Overview
Problem
The current semiconductor manufacturing process faces challenges in the time-consuming and potentially contaminated chemical liquid sampling, which affects the quality and productivity of semiconductor production.
Innovation Solution
An automatic sampling equipment with a sampling bottle, cap rotating device, and chemical liquid outlet pipelines is introduced, along with a method that includes cleaning and shaking steps to ensure accurate and efficient sampling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual sampling process is used, then operation simplicity is maintained, but sampling time increases and contamination risk occurs
Solution Approach 1:
The sampling system performs self-cleaning through automated liquid delivery and disposal mechanisms. The cleaning liquid delivery pipeline automatically delivers cleaning liquid to the sampling bottle, and the system automatically disposes of used cleaning liquid, eliminating the need for manual cleaning operations while maintaining sampling purity.
Solution Approach 2:
A cap rotating device acts as an intermediary mechanism between the sampling bottle holder and the cleaning/piping systems. This device automates the cap opening and closing operations, enabling automated sampling while reducing direct human contact with chemical liquids, thus improving efficiency without excessive complexity.
2Measurement precision
If automated sampling equipment is introduced, then sampling efficiency improves, but device complexity increases
Solution Approach 1:
The sampling equipment is divided into distinct functional modules: a sampling bottle holder for positioning, a cap rotating device for seal management, a cleaning liquid delivery pipeline for purification, and a chemical liquid delivery pipeline for sampling. This segmentation allows each component to perform its specific function reliably, improving sampling accuracy while keeping individual component complexity manageable.
Solution Approach 2:
The sampling bottle serves multiple functions: it holds the chemical liquid sample, receives cleaning liquid for purification, and is manipulated by the cap rotating device. This multi-functionality reduces the need for separate specialized components, improving sampling accuracy without proportionally increasing overall device complexity.
3Productivity
If sampling process is accelerated, then productivity improves, but contamination risk increases
Solution Approach 1:
The system performs preliminary cleaning by delivering cleaning liquid to the sampling bottle before the actual chemical liquid sampling occurs. This pre-cleaning action removes potential contaminants from the sampling environment, enabling fast automated sampling while maintaining sample purity and preventing contamination.
Data Source
AI summary
An automatic sampling equipment includes a sampling bottle and an automatic sampling module. The sampling bottle includes a cap and a body. The automatic sampling module is utilized to hold the sampling bottle for sampling a chemical liquid. In addition, the automatic sampling module includes a sampling bottle holder and a cap rotating device. The sampling bottle holder is utilized to hold the body of the sampling bottle, and the cap rotating device is equipped above the sampling bottle holder to open or close the cap of the sampling bottle. Furthermore, an automatic sampling method is also disclosed herein.