Chemical Sensor Protruded Surface for Noise Reduction
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Solution Overview
Problem
Large-scale chemical sensor arrays face noise susceptibility issues due to reduced sensing surface area, leading to decreased signal-to-noise ratio and accuracy in detecting chemical and biological processes.
Innovation Solution
The chemical sensors incorporate a floating gate conductor with a dielectric material and a conductive element extending over the sidewall, creating a larger sensing surface area while maintaining a small footprint, thereby reducing noise and enhancing accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If large-scale chemical sensor arrays are used to detect chemical processes, then the detection capability and measurement coverage are improved, but the sensor output signals become susceptible to noise and accuracy decreases
Solution Approach 1:
The sensor surface is extended from a two-dimensional plane to a three-dimensional protruding structure. The conductive element protrudes from the sensor surface into the reaction volume, creating additional sensing surface area in the vertical dimension. This allows the sensor to maintain small footprint while increasing effective sensing area, thereby improving signal-to-noise ratio without sacrificing array scalability.
2Productivity
If the sensor footprint is reduced to enable high-density arrays, then the array density and productivity are improved, but the sensing surface area is reduced leading to increased noise susceptibility
Solution Approach 1:
By extending the sensing surface vertically through protruding conductive elements, the invention decouples the relationship between footprint and sensing area. The horizontal footprint remains small for high-density arrays, while the vertical extension provides increased sensing surface area, thereby maintaining both high array density and good signal-to-noise ratio.
Solution Approach 2:
The protruding conductive element is integrated within the existing sensor structure, nesting the extended sensing surface within the overall sensor package. This allows the sensing function to be enhanced without increasing the external footprint, enabling high-density array configuration while maintaining adequate sensing surface area.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design allows for high-density arrays with improved signal accuracy by increasing the sensing surface area without increasing the footprint, effectively mitigating noise issues associated with small sensing surfaces.
Implementation Method 1
The operation of the chemFET is based on the modulation of channel conductance, caused by changes in charge at the sensitive area due to a chemical reaction occurring nearby. The modulation of the channel conductance changes the threshold voltage of the chemFET, which can be measured to detect and/or determine characteristics of the chemical reaction.
Implementation Method 2
The presence of ions in an analyte solution alters the surface potential at the interface between the ion-sensitive layer and the analyte solution, due to the protonation or deprotonation of surface charge groups caused by the ions present in the analyte solution.
Data Source
AI summary
In one implementation, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material defines an opening extending to the upper surface of the floating gate conductor. A conductive element on a sidewall of the opening and extending over an upper surface of the dielectric material.