Chemical Solution Feeder Dual-Filter Particle Removal
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Solution Overview
Problem
Existing chemical solution feeding techniques face challenges in maintaining filtering efficiency when dealing with high-temperature chemical solutions, as hydrophilic filters can release particles and deteriorate in performance, leading to increased particle contamination.
Innovation Solution
A dual-filter system is employed, where a hydrophilic filter efficiently removes particles at room temperature and a hydrophobic filter, with reduced temperature dependence, further removes particles at high temperatures, ensuring effective particle removal throughout the temperature change.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a hydrophilic filter is used to remove particles in chemical solution at room temperature, then particle removal efficiency is improved, but when the chemical solution is heated to high temperature, the filter releases particles and filtering efficiency deteriorates
Solution Approach 1:
The filtration system is segmented into two distinct filters: a hydrophilic filter for room temperature operation and a hydrophobic filter for high temperature operation. Each filter is optimized for its specific temperature range, preventing the performance deterioration that occurs when a single filter type is used across both temperature conditions.
Solution Approach 2:
The invention changes the key parameter of filter hydrophobicity/hydrophilicity based on temperature conditions. By selecting different filter types (hydrophilic for room temperature, hydrophobic for high temperature), the system adapts to temperature parameter changes and maintains optimal filtration performance at each stage.
2Manufacturing precision
If the pore diameter of the filter is reduced to remove smaller particles, then particle removal capability is improved, but wettability of the filter deteriorates making it difficult for chemical solution to fit in
Solution Approach 1:
Different filter types with different surface properties are applied at different locations in the temperature profile. The hydrophilic filter with smaller pore diameter is used at room temperature where wettability is needed, while the hydrophobic filter is used at high temperature where thermal stability is prioritized, allowing each location to have optimized properties for its specific conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach ensures efficient particle removal from chemical solutions at both room and high temperatures, maintaining filtering efficiency and reducing particle contamination, enabling effective feeding of filtered chemical solutions to substrates.
Implementation Method 1
a first filter that is provided in the feed flow path to remove particles in the chemical solution at room temperature injected from the supply source to the feed flow path
Implementation Method 2
the first filter is a hydrophilic filter capable of efficiently removing particles in a chemical solution at room temperature by filtering and chemically adsorbing the particles
Implementation Method 3
a heating unit that heats the chemical solution in a portion of the feed flow path, closer to the feed target than the first filter
Implementation Method 4
a second filter that is provided in a portion of the feed flow path, closer to the feed target than the first filter, to remove particles in the chemical solution at high temperature, heated by the heating unit, flowing through the feed flow path toward the feed target; the second filter is a hydrophobic filter
Data Source
AI summary
A chemical solution feeder feeds a chemical solution to a predetermined feed target, and includes: a feed flow path that is connected at its one end to a supply source of a chemical solution at room temperature and at its other end to a feed target, to guide the chemical solution to the feed target from the supply source; a first filter that removes particles in a chemical solution at room temperature injected from the supply source into the feed flow path; a heating unit that heats the chemical solution having passed through the first filter; and a second filter that removes particles in the chemical solution at high temperature heated by the heating unit, flowing through the feed flow path toward the feed target, wherein the first filter is a hydrophilic filter and the second filter is a hydrophobic filter.