Chemical Solution Supply System with In-Solution Foreign Matter Detection
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Solution Overview
Problem
Existing chemical solution supply systems for semiconductor manufacturing struggle to accurately determine the optimal time for filter exchange due to indirect methods that may lead to unnecessary filter replacement or failure to detect foreign matter accumulation, affecting the quality of chemical solutions.
Innovation Solution
A chemical solution supply system that includes a filter unit with an in-solution foreign matter detection device to measure foreign particles in real-time, combined with a calculation device to determine the total number of particles passing through the filter, allowing for precise assessment of filter quality and timely exchange.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If filter exchange is performed based on indirect methods (elapsed time, pressure differential), then filter replacement is ensured, but unnecessary filter replacements occur and foreign matter accumulation cannot be accurately detected
Solution Approach 1:
The patent replaces indirect mechanical indicators (pressure differential, elapsed time) with direct optical detection using light scattering measurement. The foreign matter detection device measures the actual concentration of foreign matters in the chemical solution, providing accurate real-time data to determine when filter exchange is truly necessary, thereby eliminating unnecessary replacements.
2Productivity
If filter is used for extended period to reduce replacements, then productivity improves, but foreign matter may accumulate and affect solution quality
Solution Approach 1:
The patent implements a feedback mechanism where the foreign matter detection device continuously monitors the chemical solution and provides real-time data on foreign matter concentration. This feedback allows the system to extend filter usage as long as quality standards are met, while automatically triggering filter exchange when foreign matter accumulation reaches critical levels, thus optimizing both productivity and solution quality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the use of filters in a sound state while minimizing unnecessary filter replacements, ensuring the quality of chemical solutions by accurately determining the filter exchange time based on real-time foreign matter detection and flow rate measurements.
Implementation Method 1
an in-solution foreign matter detection device that measures an amount of foreign matters in the chemical solution
Data Source
AI summary
According to one embodiment, there is provided a chemical solution supply system including: a tank configured to store a chemical solution; a first pipe connected to the tank and configured to provide the chemical solution; a first filter unit connected to the first pipe and having a first filter configured to filter the chemical solution; a second pipe connected to the first filter unit and configured to provide the chemical solution filtered by the first filter; and a detector connected to the first pipe and configured to detect foreign matter in the chemical solution in the first pipe.