Chemical Liquid Supply Unit with Spectroscopy Impurity Detection
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Solution Overview
Problem
Conventional chemical liquid inspection methods require excessive time, leading to delayed detection of impurities during chemical reactions, which reduces process yield, increases defective product generation, and poses a risk of process accidents.
Innovation Solution
A chemical liquid supply unit equipped with a spectroscopy method for real-time impurity detection, using a Fourier-transform infrared or near-infrared spectrometer to identify IPA derivatives like acetone, acetic acid, and isopropyl acetate, allowing immediate discharge of impurities and preventing defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional chemical liquid inspection methods are used, then impurities can be detected, but the inspection requires excessive time and cannot be performed in real-time
Solution Approach 1:
The patent replaces conventional mechanical/chemical inspection methods with a spectroscopy-based detection system. The spectroscopy detection unit uses light absorption characteristics to identify impurities in the chemical liquid, enabling rapid real-time detection without the time-consuming procedures of conventional methods.
Solution Approach 2:
The patent introduces an intermediary detection system (spectroscopy unit) that mediates between the chemical liquid flow and the control system. This intermediary uses optical properties to detect impurities, providing a fast non-contact measurement method that bridges the gap between chemical analysis and real-time process control.
2Productivity
If chemical liquid is supplied continuously without real-time inspection, then process productivity is maintained, but impurities generated by chemical reactions reduce process yield and create defective products
Solution Approach 1:
The patent implements a closed-loop feedback system where the spectroscopy detection unit continuously monitors the chemical liquid for impurities, and the control unit automatically responds by adjusting valve operations to discharge contaminated liquid. This real-time feedback mechanism maintains both high productivity and process reliability by preventing defective products without interrupting the overall process flow.
Solution Approach 2:
The patent maintains continuous chemical liquid supply and monitoring throughout the process. The spectroscopy detection operates continuously, and the system maintains liquid flow without interruption, using rapid detection and automated valve control to ensure that useful action (substrate processing) continues uninterrupted while eliminating impurity-related defects.
3Measurement precision
If conventional inspection methods are used, then impurity analysis can be performed, but immediate action cannot be taken and process accident risk increases
Solution Approach 1:
The patent implements a real-time feedback control system where spectroscopy detection immediately identifies impurities and triggers automated valve operations to discharge contaminated chemical liquid. This closed-loop feedback eliminates the delay between detection and action, preventing process accidents by responding instantaneously to impurity generation.
Solution Approach 2:
The system performs preliminary detection of impurities before they can cause process accidents. The spectroscopy unit continuously monitors the chemical liquid upstream, detecting impurity formation early and triggering preventive discharge actions before the contaminated liquid can reach the substrate processing stage where it would cause defects or safety issues.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables real-time inspection and immediate action to eliminate impurity effects, preventing defects and reducing the risk of process accidents by detecting and removing IPA derivatives during substrate processing.
Implementation Method 1
a measurement probe which is inserted into the chemical liquid supply line and emits infrared light or near-infrared light to the chemical liquid flowing through the chemical liquid supply line and detects light transmitted through the chemical liquid or detects light reflected on the chemical liquid
Implementation Method 2
a measurement probe which is inserted into the chemical liquid supply line and emits infrared light or near-infrared light to the chemical liquid
Implementation Method 3
a Fourier transformer which acquires a spectrum from the light detected from the measurement probe
Data Source
AI summary
A chemical liquid supply unit includes a chemical liquid storage storing a chemical liquid, a chemical liquid supply line that is connected to the chemical liquid storage, the chemical liquid flowing through the chemical liquid supply line from the chemical liquid storage, and a chemical liquid inspection means detecting impurities from the chemical liquid flowing through the chemical liquid supply line using a spectroscopy method.