Chemical Supply Pump Suction Pressure Control
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Solution Overview
Problem
The existing chemical supply systems for semiconductor fabrication face challenges in maintaining consistent suction times due to varying hydraulic head pressures in chemical tanks, which affect the efficiency of chemical solution dispensing.
Innovation Solution
A chemical supply system that includes a pump chamber and a working chamber with a volume-changing member, a pressure adjuster, a switching controller, a suction-side opening-closing valve, and a pressure detector to control suction pressure based on detected gas pressures, allowing for automatic adjustment to hydraulic head pressure changes without requiring changes upstream or downstream of the pump.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a liquid level sensor or weight sensor is provided in the chemical tank to detect hydraulic head pressure variation, then the suction operation can be controlled according to detection results, but the system requires changes on both the chemical tank side and the chemical supply pump side, increasing the number of changes required for existing systems
Solution Approach 1:
The patent introduces a pressure detector as an intermediary device that detects pressure in the working chamber or connected space, which reflects hydraulic head pressure changes without requiring direct measurement in the chemical tank. This intermediary approach allows indirect measurement and control, reducing the need for extensive system modifications while maintaining reliable suction operation control
Solution Approach 2:
The patent replaces the mechanical measurement approach (liquid level sensor or weight sensor in the chemical tank) with a pressure detection system that measures pressure in the working chamber or connected space. This substitution simplifies the system by using pressure as a proxy for hydraulic head pressure, requiring fewer changes to existing systems
2Object-affected harmful factors
If a needle valve is provided at the chemical tank side with manual throttle adjustment, then the effect of hydraulic head pressure can be reduced, but the adjustment cannot be performed automatically
Solution Approach 1:
The patent implements a feedback control system where the pressure detector continuously monitors pressure in the working chamber or connected space, and the suction controller automatically adjusts the suction pressure based on detected pressure variations. This closed-loop feedback mechanism enables automatic compensation for hydraulic head pressure changes, eliminating the need for manual needle valve adjustment while effectively reducing the harmful effects of hydraulic head pressure variations
Solution Approach 2:
The patent changes the control parameter from manual throttle position to automated suction pressure adjustment. By detecting pressure variations and automatically adjusting suction pressure, the system dynamically compensates for hydraulic head pressure effects without requiring physical intervention, thereby reducing harmful effects while increasing automation
3Productivity
If suction pressure is not adjusted according to hydraulic head pressure changes, then the system operation is simple, but the suction time varies significantly affecting dispensing efficiency
Solution Approach 1:
The patent uses feedback control where the pressure detector monitors pressure changes and the suction controller adjusts suction pressure accordingly to maintain consistent suction time. This feedback mechanism ensures stable dispensing efficiency despite variations in hydraulic head pressure, achieving high productivity with minimal increase in system complexity
Solution Approach 2:
The system performs self-adjustment of suction pressure based on detected pressure variations, eliminating the need for external intervention or complex control systems. The pressure detector and suction controller work together to automatically compensate for hydraulic head pressure changes, maintaining consistent suction time and dispensing efficiency through self-service operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures a constant suction time regardless of hydraulic head pressure variations, directly reading and adjusting suction pressure to match hydraulic head pressure changes, minimizing hardware modifications to existing systems.
Implementation Method 1
a pressure detector configured to detect at least one of a gas pressure in a space connected to the working chamber and a gas pressure in the working chamber
Implementation Method 2
the pump chamber and the working chamber commonly having a volume-changing member configured to actuate the pump chamber to suction and discharge the chemical solution, the volume-changing member being actuated in response to a pressure of the working gas loaded in the working chamber
Implementation Method 3
a suction controller configured to control the suction pressure applied to the working chamber by the pressure adjuster, based on a detection result of the pressure detector
Data Source
AI summary
This invention provides a chemical supply system for supplying chemical solution from a chemical tank. The chemical supply system includes a chemical supply pump, a pressure adjuster configured to suction the chemical solution into the pump chamber by setting the pressure of working gas to a suction pressure, a switching controller configured to switch the suction-side opening-closing valve to the open state for starting to fill the pump chamber with the chemical solution, a pressure detector configured to detect at least one of a gas pressure in a space connected to the working chamber and a gas pressure in the working chamber when the suction-side opening-closing valve is switched to the open state and starts an inflow of the chemical solution to the pump chamber, and a suction controller configured to control the suction pressure applied to the working chamber by the pressure adjuster, based on a detection result of the pressure detector.