Liquid Chemical Supply Module With Circulation Lines for Stable Flow
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Solution Overview
Problem
Existing liquid chemical supply modules fail to maintain consistent pressure and flow rate, leading to particle contamination and equipment performance deviations across multiple substrate processing apparatuses.
Innovation Solution
A liquid chemical supply module with a main supplier and distribution suppliers, incorporating back pressure valves, flow control valves, circulation lines, and relief valves to maintain constant pressure and minimize flow control valve operation, ensuring stable particle performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a back pressure valve is mounted on the main line to maintain constant pressure, then pressure stability is improved, but the opening ratio of flow control valves must be changed for each chamber which reduces reliability
Solution Approach 1:
The system divides the liquid chemical supply into separate distribution lines for each chamber, with individual flow control valves and relief valves on each line. This segmentation allows each chamber to independently maintain its required flow rate without affecting other chambers, eliminating the need to change opening ratios when adding or removing chambers.
Solution Approach 2:
Relief valves are introduced as intermediary components on each distribution line to maintain constant front pressure. These relief valves act as mediators that automatically adjust to maintain pressure stability, eliminating the need for manual adjustment of flow control valve opening ratios when system configuration changes.
2Speed
If the opening ratio of flow control valve is changed to maintain ejection rate, then flow rate consistency is improved, but dead zone is reduced and particles are ejected onto substrate
Solution Approach 1:
The relief valve is positioned to maintain constant front pressure before the liquid chemical reaches the flow control valve. This preliminary pressure stabilization ensures that the flow control valve operates in a stable pressure environment, preventing sudden opening ratio changes that would create dead zones and eject particles.
3Adaptability or versatility
If flow control valve opening ratio is adjusted for each substrate processing apparatus, then individual chamber flow requirements are met, but equipment and chamber performance deviations are caused
Solution Approach 1:
The supply system is segmented into independent distribution lines for each chamber, each with its own relief valve and flow control valve. This segmentation allows each chamber to be independently configured for its specific flow requirements while maintaining consistent equipment performance across all chambers through standardized relief valve positioning.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution maintains consistent pressure and flow rate, reducing particle contamination and preventing equipment performance deviations, thereby enhancing the reliability of substrate processing.
Implementation Method 1
a back pressure valve (BPV) may be mounted on a main line connected to the liquid chemical tank so as to maintain a pressure of the liquid chemical in the main line at a constant pressure
Implementation Method 2
a first circulation line branched from the distribution line and connecting between the distribution line and the main line to circulate at least a portion of the liquid chemical flowing in the distribution line back to the main line
Data Source
AI summary
Provided is a liquid chemical supply module and a substrate processing apparatus including the same, the liquid chemical supply module including a main supplier for supplying a liquid chemical from a liquid chemical tank to at least one substrate processing apparatus, and at least one distribution supplier for connecting between the main supplier and any one substrate processing apparatus to distribute the liquid chemical supplied through the main supplier to the any one substrate processing apparatus, wherein the distribution supplier includes a distribution line branched from a main line of the main supplier, a first circulation line branched from the distribution line and connecting between the distribution line and the main line, and a second circulation line branched from the distribution line connecting between the distribution line and the main line.