Chicane Blanker Assembly for Neutral Particle Blocking in P-FIB
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Solution Overview
Problem
Plasma-focused ion beam (P-FIB) systems experience significant staining and image saturation due to neutral particles reaching the sample, which is exacerbated by higher gas pressures and larger beam currents, making it difficult to prevent neutrals from impacting the sample during processing and imaging.
Innovation Solution
A chicane blanker assembly is introduced, comprising an entrance, exit, neutrals blocking structures, chicane deflectors, and a beam blocking structure, which deflects the charged particle beam around neutrals blocking structures and into a beam blocking structure, preventing neutrals from reaching the sample while allowing the ion beam to irradiate the sample effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If plasma sources are used to generate plasma-focused ion beams, then higher current and faster milling rates are achieved, but significant sample staining occurs due to neutral particles reaching the sample
Solution Approach 1:
The beam path is segmented into multiple sections with alternating deflectors that create a zigzag trajectory. Neutral particles traveling in straight lines are blocked by blocking structures positioned at each segment, while charged particles follow the deflected path and reach the sample. This segmentation allows selective blocking of neutrals without affecting the ion beam.
Solution Approach 2:
Electric fields generated by electrostatic deflectors serve as intermediaries to manipulate the charged particle beam. These fields deflect the ion beam along a curved path that bypasses neutral particle blocking structures, enabling the ions to reach the sample while neutrals are blocked. The electric fields act as a mediator that selectively guides charged particles around obstacles that block neutral particles.
2Quantity of substance
If plasma sources operate at higher gas pressures to produce larger beam currents, then productivity increases, but more neutral particles leak down the column and reach the sample
Solution Approach 1:
The beam trajectory is moved from a straight one-dimensional path to a two-dimensional zigzag path using alternating electrostatic deflectors. This dimensional change allows the beam to bypass blocking structures in the perpendicular dimension, enabling neutral particle blocking without reducing beam current. The ions travel through additional spatial dimensions to reach the sample while neutrals are blocked in the original dimension.
3Productivity
If the P-FIB column is configured to produce large ion currents for high-throughput processing, then milling efficiency improves, but image saturation occurs during SEM imaging due to neutral particle-induced secondary electron emission
Solution Approach 1:
The chicane blanker assembly is configured to block neutral particles before they can reach the sample and cause secondary electron emission during SEM imaging. By preliminarily removing neutrals from the beam path, the system prevents the harmful effect of image saturation before it occurs, allowing high-current P-FIB operation without compromising subsequent imaging quality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The chicane blanker assembly effectively reduces sample staining and image saturation by blocking neutrals, enabling improved processing and imaging performance in P-FIB systems by preventing neutral particles from impacting the sample during milling and imaging.
Implementation Method 1
a plurality of chicane deflectors (111-114) sequentially arranged in series between the entrance and the exit and configured to deflect the beam along a path that bypasses the neutrals blocking structure
Implementation Method 2
a beam blocking structure arranged between the third chicane deflector and the fourth chicane deflector
Data Source
AI summary
A chicane blanker assembly for a charged particle beam system includes an entrance and an exit, at least one neutrals blocking structure, a plurality of chicane deflectors, a beam blanking deflector, and a beam blocking structure. The entrance is configured to accept a beam of charged particles propagating along an axis. The at least one neutrals blocking structure intersects the axis. The plurality of chicane deflectors includes a first chicane deflector, a second chicane deflector, a third chicane deflector, and a fourth chicane deflector sequentially arranged in series between the entrance and the exit and configured to deflect the beam along a path that bypasses the neutrals blocking structure and exits the chicane blanker assembly through the exit. In embodiments, the chicane blanker assembly includes a two neutrals blocking structures. In embodiments, the beam blocking structure is arranged between the third chicane deflector and the fourth chicane deflector.