Make-Break Chiller Connector for Sliding RF Bias Assemblies
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Solution Overview
Problem
In substrate processing systems, providing a reliable make-break fluid connection in a confined space below the RF bias assembly is challenging due to limited access and space constraints, which complicates service and maintenance operations.
Innovation Solution
A hinge assembly and make-break connector system that allows the substrate support and RF bias assembly to slide and pivot, with a make-break connector that includes a first and second fluid passage connected by a fastener, enabling disconnection and reconnection while maintaining alignment through alignment pins, and an enclosure that can be purged with molecular nitrogen or clean dry air to prevent condensation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a make-break fluid connection is provided in a confined space below the RF bias assembly, then fluid delivery is enabled, but service and maintenance operations become difficult due to limited access and space constraints
Solution Approach 1:
The make-break connector is divided into separate male and female portions that can be independently positioned. The male portion is attached to the movable bias assembly while the female portion remains with the stationary chamber, allowing the fluid connection to be segmented between moving and stationary components for easier service access.
Solution Approach 2:
A purgable enclosure is introduced as an intermediary space housing the make-break connector. This enclosure provides a controlled environment for the fluid connection while allowing technicians to access and service the connector from outside the confined space below the bias assembly.
2Ease of repair
If the substrate support and RF bias assembly are allowed to slide and pivot for maintenance access, then serviceability is improved, but fluid connection reliability may be compromised during movement
Solution Approach 1:
The fluid connection system is designed to be dynamic rather than rigid. The make-break connector allows the bias assembly to slide and pivot freely while maintaining fluid connectivity through the male-female portion interface, which can accommodate the relative motion between stationary and movable components.
Solution Approach 2:
The fluid passages within the make-break connector are designed to be flexible enough to accommodate the sliding and pivoting motion of the bias assembly while maintaining sealed connections, allowing movement without compromising fluid connection reliability.
3Manufacturing precision
If alignment pins are used to ensure precise alignment of the make-break connector portions, then connection precision is improved, but device complexity increases
Solution Approach 1:
The alignment function is segmented into separate alignment pins that are distinct from the fluid passage components. This allows the alignment mechanism to be independently optimized while keeping the fluid connection structure relatively simple.
Solution Approach 2:
The alignment pins automatically perform their alignment function when the male and female connector portions are brought together during assembly or reconnection, eliminating the need for complex external alignment mechanisms or manual adjustment procedures.
Data Source
AI summary
A substrate processing system includes a hinge assembly configured to allow a substrate support and an RF bias assembly to slide, from a docked position to an undocked position, relative to other components of a processing chamber. A make-break connector is configured to supply fluid to at least one of the substrate support and the RF bias assembly. The make-break connector includes a first portion including a first fluid passage connected to a first conduit. A second portion includes a second fluid passage connected to a second conduit. The first fluid passage in the first portion fluidly communicates with the second fluid passage in the second portion. The first portion is configured to slide with the substrate support and the RF bias assembly relative to the second portion and the other portions of the processing chamber. The first portion is located inwardly relative to the second portion.