Chiller system
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Solution Overview
Problem
Conventional chiller systems face challenges in maintaining temperature control and pressure resistance when using fluorine-based inert liquids with high boiling points, leading to cavitation issues and increased power consumption, particularly in high-temperature applications, which results in reduced cooling efficiency and higher costs due to the need for robust and larger devices.
Innovation Solution
A chiller system that utilizes a refrigerant with a low boiling point, incorporating an internal and external circulation path with a control device that includes a pressurizing path and throttle means to manage refrigerant flow and pressure, allowing for efficient operation without boiling, even at high temperatures, while minimizing device size and cost.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If fluorine-based inert liquid with high boiling point is used as coolant, then temperature control in high temperature region is improved, but cavitation occurs and power consumption increases
Solution Approach 1:
The patent changes the physical parameter of the coolant by selecting a refrigerant with a lower boiling point than conventional fluorine-based inert liquids. This parameter change allows the system to operate in high temperature regions without causing cavitation, as the refrigerant remains in liquid state at temperatures where conventional coolants would boil and cause cavitation issues.
Solution Approach 2:
The patent utilizes phase transition properties of the refrigerant by designing a system that controls the refrigerant to remain in liquid phase during circulation through the wafer mounting base, while allowing phase change in the heat exchanger. This controlled phase transition enables efficient heat transfer without cavitation in the circulation system.
2Temperature
If fluorine-based inert liquid with high boiling point is used as coolant, then high temperature operation is enabled, but kinematic viscosity increases at low temperatures reducing cooling efficiency
Solution Approach 1:
The patent changes the viscosity parameter by selecting a refrigerant with inherently lower kinematic viscosity compared to conventional fluorine-based inert liquids. This viscosity optimization ensures efficient coolant flow and heat transfer at low temperatures while maintaining the ability to operate at high temperatures without cavitation.
3Stability of the object's composition
If fluorine-based inert liquid with high boiling point is used as coolant, then high temperature stability is improved, but device size and cost increase due to robust pressure resistance requirements
Solution Approach 1:
The patent changes the boiling point parameter of the coolant to a lower value, which paradoxically allows the system to operate at high temperatures without requiring excessive pressure resistance. By using a refrigerant that remains stable in liquid form at operating temperatures without requiring high pressure, the system achieves high temperature stability with simpler, smaller, and more cost-effective device components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves high pressure resistance and efficient cooling performance at low temperatures using refrigerant with low viscosity, preventing cavitation and reducing power consumption, thus maintaining effective cooling without increasing device size or cost.
Implementation Method 1
the feed path is equipped with an external circulation pump and a temperature sensor
Implementation Method 2
the communication path is equipped with throttle means configured to limit a flow rate of the refrigerant flowing into the refrigerant tank
Implementation Method 3
a chiller system that circulates refrigerant between a wafer mounting base and a chiller unit
Implementation Method 4
The chiller system further comprises a pressurizing path for pressurizing the refrigerant flowing through the return path
Implementation Method 5
the internal circulation path includes an on-off control valve provided upstream of the refrigerant tank
Data Source
AI summary
The chiller system includes an internal circulation path, an external circulation path, and a control device. The internal circulation path is equipped with a refrigerant tank, an internal circulation pump, and a freezer. The external circulation path includes a feed path and a return path the feed path being equipped with an external circulation pump and a temperature sensor. A communication path that provides communication between the return path and the refrigerant tank is equipped with throttle means. The internal circulation path is equipped with an on-off control valve, with one end of the pressurizing path being connected to an upstream side of the on-off control valve in the internal circulation path and the other end being connected to an upstream side of the throttle part in the communication path. The control device controls operation of the on-off control valve based on a measurement result of the temperature sensor.