Chip Package Anchor Structure for Antiwarpage Bonding Accuracy

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Solution Overview

Problem

Forming a reliable chip package structure with multiple chips is challenging due to the complexity of integrating multiple functions and ensuring structural stability and reliability, particularly in reducing warpage and thermal stress.

Innovation Solution

The solution involves a chip package structure that includes a carrier substrate, adhesive layers, chips with conductive structures, a redistribution structure, anchor structures, and an antiwarpage structure. The anchor structures are used to align and secure the antiwarpage structure, improving bonding accuracy and reducing warpage, while the antiwarpage structure aids in heat dissipation and structural stability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple chips are integrated into a single package to achieve multiple functions, then the functionality and versatility of the device is improved, but the structural complexity and difficulty of ensuring reliability increase

Engineering Contradiction:
ImprovefunctionalityVSAvoidstructural complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent divides the package structure into distinct functional modules: carrier substrate for chip mounting, redistribution layers for electrical connections, anchor structures for mechanical support, and antiwarpage structures for stability. Each segment performs a specific function, allowing complex multi-chip integration while maintaining manageability through modular design.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements a hierarchical nesting structure where chips are mounted on the carrier substrate, which is then integrated with redistribution layers, anchor structures, and antiwarpage structures in successive layers. This nested arrangement allows multiple functional layers to be compactly integrated while maintaining clear structural boundaries and functional independence.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Ease of manufacture

If traditional packaging methods are used without anchor structures, then the manufacturing process is simpler, but warpage and thermal stress cause reliability issues

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidstructural stability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent incorporates anchor structures into the package design before final assembly and bonding processes. These anchor structures are pre-positioned on the carrier substrate to provide mechanical reference points and structural reinforcement that prevent warpage during subsequent manufacturing steps and operational thermal cycling, ensuring reliability without complicating the overall manufacturing flow.

Inventive Principle:
Principle #10Preliminary action

3Stability of the object's composition

If antiwarpage structures are added to reduce warpage and thermal stress, then the structural stability is improved, but the device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improvestructural stabilityVSAvoidstructure complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The patent places antiwarpage structures at specific critical locations on the carrier substrate where warpage and thermal stress are most likely to occur, rather than uniformly distributing them across the entire package. This localized approach provides maximum structural stability where needed while minimizing the overall complexity and material usage of the antiwarpage system.

Inventive Principle:
Principle #3Local quality

4Manufacturing precision

If anchor structures are used to align and secure the antiwarpage structure, then the bonding accuracy is improved, but the manufacturing process becomes more complex

Engineering Contradiction:
Improvebonding accuracyVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The anchor structures are designed to automatically provide alignment references and mechanical guidance during the bonding process between the carrier substrate and antiwarpage structures. This self-aligning mechanism eliminates the need for complex external alignment equipment or additional bonding steps, achieving high bonding accuracy while keeping the manufacturing process relatively simple.

Inventive Principle:
Principle #25Self-service

Data Source

PatentUS11764168B2Chip package structure with anchor structure and method for forming the same
Publication Date: 2023.09.19 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11764168B2 patent drawing
  • US11764168B2 patent drawing
  • US11764168B2 patent drawing

AI summary

A chip package structure is provided. The chip package structure includes a wiring substrate having a surface. The chip package structure includes a chip structure over the surface of the wiring substrate. The chip package structure includes an antiwarpage structure over the surface of the wiring substrate. The antiwarpage structure surrounds the chip structure. The chip package structure includes a first anchor structure affixed to the surface of the wiring substrate and adjacent to a first lower portion of the antiwarpage structure. The first lower portion is between the first anchor structure and the chip structure, and the first anchor structure is electrically isolated from the chip structure.