Chip Arrangement Pillar Interconnects for Stress Distribution

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Solution Overview

Problem

Conductive interconnects in semiconductor structures are prone to breakage and stress, leading to reliability issues in chip arrangements, which affect the integrity of connections between chips and external connection regions.

Innovation Solution

A chip arrangement featuring a plurality of pillars formed on bonding pads to connect the chip to a chip-external connection region, with the pillars designed to distribute forces and reduce stress, thereby enhancing the reliability of the interconnections.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conductive interconnects are used to connect bonding pads to chip-external connection regions, then electrical connectivity is achieved, but the interconnects are prone to breakage and stress leading to reliability issues

Engineering Contradiction:
Improveconnection reliabilityVSAvoidinterconnect strength
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The conductive interconnect structure is divided into multiple segments: a first conductive interconnect formed on the bonding pad, a second conductive interconnect formed on the first, and an optional third conductive interconnect formed on the second. This segmentation distributes mechanical stress across multiple smaller components rather than concentrating it in a single interconnect, thereby reducing the probability of complete connection failure and improving overall reliability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs multiple layers of conductive interconnects and optional insulating layers with voids between them, creating a cushioning effect that absorbs and distributes mechanical stress before it can propagate through the entire connection path. This prior cushioning structure prevents stress concentration that would otherwise lead to interconnect breakage.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

2Quantity of substance

If bonding pad density is increased to improve chip utilization, then more electrical nets can be accommodated, but the complexity of forming reliable interconnections increases

Engineering Contradiction:
Improvebonding pad densityVSAvoidinterconnection structure complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The multi-layer conductive interconnect structure serves multiple functions simultaneously: it provides electrical connectivity between bonding pads and chip-external connection regions, distributes mechanical stress to prevent breakage, and can be configured in various patterns to accommodate different bonding pad densities. This universal structure handles both low and high density scenarios without requiring fundamentally different designs.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent transitions from a planar (2D) single-layer interconnect to a three-dimensional (3D) multi-layer interconnect structure. By adding the vertical dimension with multiple stacked conductive layers, the design accommodates higher bonding pad densities while maintaining reliable connections, as the additional layers provide redundant pathways and stress distribution in the vertical dimension.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS9219031B2Chip arrangement, and method for forming a chip arrangement
Publication Date: 2015.12.22 INFINEON TECHNOLOGIES AG
  • US9219031B2 patent drawing
  • US9219031B2 patent drawing
  • US9219031B2 patent drawing

AI summary

A chip arrangement may include: a chip including a plurality of electrical nets, wherein each electrical net includes at least one bonding pad; and a plurality of pillars formed on the at least one bonding pad of a majority of the plurality of electrical nets, wherein the plurality of pillars may be configured to connect the at least one bonding pad of the majority of the plurality of electrical nets to a chip-external connection region.