Chip-Scale ODMR Sensor for Sub-1000 nm Optical Transmission

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Solution Overview

Problem

Existing optical detection of magnetic resonances (ODMR) techniques face challenges in accurately measuring small changes in magnetic fields due to limitations in materials and configurations that affect fluorescence detection, particularly with traditional silicon waveguides and inefficient microwave signal application.

Innovation Solution

A compact ODMR sensor is developed using a semiconductor integrated circuit with a photonic integrated circuit, incorporating a solid-state host with color centers, optical modulators, gratings, and a microwave antenna, capable of transmitting light below 1000 nm, and a photodetector to enhance fluorescence detection and microwave pumping for precise magnetic field measurements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If traditional silicon waveguides are used for optical transmission, then device integration is achieved, but light transmission below 1000 nm is absorbed rather than transmitted

Engineering Contradiction:
Improvedevice integrationVSAvoidlight transmission
Core Design Contradiction:
Ease of manufactureVSLoss of energy

Solution Approach 1:

The patent changes the material parameter from traditional silicon to silicon nitride, which has different optical transmission properties. Silicon nitride allows transmission of light below 1000 nm wavelengths, resolving the absorption issue while maintaining waveguide integration capabilities

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs a composite photonic integrated circuit structure combining silicon nitride waveguides with other materials optimized for specific optical functions, achieving both integration and low-loss transmission at wavelengths below 1000 nm

Inventive Principle:
Principle #40Composite materials

2Measurement precision

If fluorescence detection sensitivity is increased, then magnetic field measurement precision improves, but device complexity increases

Engineering Contradiction:
Improvemagnetic field measurement precisionVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent merges the fluorescence detection function directly into the photonic integrated circuit by incorporating photodetectors on the same chip, eliminating the need for separate detection systems and reducing overall device complexity while maintaining high measurement precision

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The photonic integrated circuit performs multiple functions including light generation, modulation, transmission, and detection on a single platform, reducing the number of separate components needed and simplifying the overall device architecture

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Productivity

If microwave pumping power is increased to improve fluorescence excitation, then color center excitation efficiency improves, but energy consumption increases

Engineering Contradiction:
Improvecolor center excitation efficiencyVSAvoidmicrowave pumping power
Core Design Contradiction:
ProductivityVSUse of energy by moving object

Solution Approach 1:

The patent changes the microwave frequency parameter to match the resonant frequency of the color centers more precisely, improving excitation efficiency at lower power levels through resonant coupling rather than brute-force power increase

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent replaces traditional high-power microwave pumping with optically pumped color centers that convert optical energy to microwave-frequency electromagnetic fields, achieving efficient excitation with lower overall energy consumption

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables accurate and sensitive measurement of magnetic fields by improving fluorescence detection and microwave signal application, allowing for precise determination of magnetic field strength and direction, even at low magnetic strengths.

Implementation Method 1

the fluorescence of a crystal defect arising from excitation by an optical signal may be affected by the presence of a magnetic field

Methodology Applied
Scientific EffectFluorescence: Fluorescence

Implementation Method 2

a photodetector in optical communication with the plurality of color centers

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Implementation Method 3

when the crystal defect is subject to microwave pumping at a resonant frequency

Methodology Applied
Scientific EffectMicrowave Radiation: Microwave Radiation

Implementation Method 4

microwave pumping at a resonant frequency

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 5

a photonic integrated circuit comprising optical modulators and a grating array in optical communication with the plurality of color centers via a material capable of transmitting light below 1000 nm

Methodology Applied
Scientific EffectOptical Transmission: Waveguide (optics)

Implementation Method 6

a photonic integrated circuit comprising optical modulators and a grating array

Methodology Applied
Scientific EffectDiffraction Grating: Diffraction Grating

Data Source

PatentUS20250341595A1Chip-scale optically determined magnetic resonance sensor
Publication Date: 2025.11.06 TOYOTA MOTOR ENG & MFG NORTH AMERICA INC
  • US20250341595A1 patent drawing
  • US20250341595A1 patent drawing
  • US20250341595A1 patent drawing

AI summary

Embodiments of an integrated apparatus for measuring an external magnetic or other external stimulus are presented herein. This apparatus may include a solid-state host comprising a plurality of color centers, a photonic integrated circuit comprising optical modulators and a grating array in optical communication with the plurality of color centers via a material capable of transmitting light below 1000 nm, a semiconductor integrated circuit comprising a plurality of metal layers, a microwave antenna, and a photodetector in optical communication with the plurality of color centers.