Chip-Scale ODMR Sensor with Sub-1000 nm Light Transmission
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Solution Overview
Problem
Existing optical detection of magnetic resonances (ODMR) techniques face challenges in accurately measuring small changes in magnetic fields due to limitations in sensitivity and spatial resolution, particularly when using traditional silicon waveguides that absorb light below 1100 nm.
Innovation Solution
A compact ODMR sensor is developed using a semiconductor integrated circuit with a solid-state host containing color centers, a photonic integrated circuit with optical modulators and gratings for light transmission below 1000 nm, and a microwave antenna for magnetic field measurement, combined with a photodetector to detect fluorescence changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional silicon waveguides are used for optical transmission, then the device structure is simple and manufacturing is easy, but light absorption occurs for wavelengths below 1100 nm reducing measurement precision
Solution Approach 1:
The patent changes the material parameter of the waveguide from traditional silicon to silicon nitride or silicon carbide, which have different optical transmission properties. These materials transmit light below 1000 nm without absorption, enabling precise magnetic field measurements while maintaining waveguide-based optical transmission.
Solution Approach 2:
The patent employs composite material structures in the photonic integrated circuit, combining silicon nitride or silicon carbide waveguides with metal layers for microwave transmission. This composite approach allows simultaneous optimization of optical transmission (using silicon nitride/carbide) and microwave functionality (using metals), resolving the contradiction between measurement precision and device complexity.
2Measurement precision
If silicon nitride or silicon carbide materials are used for light transmission below 1000 nm, then measurement precision is improved, but manufacturing complexity and cost increase
Solution Approach 1:
The patent segments the device into distinct functional layers: silicon nitride or silicon carbide layers for optical transmission, metal layers for microwave antenna and transmission lines, and semiconductor layers for photodetectors. This segmentation allows each material to be optimized for its specific function while using standard semiconductor fabrication techniques for each layer, making the complex structure manufacturable.
Solution Approach 2:
The patent changes the fabrication parameters by using established semiconductor processing techniques for depositing and patterning silicon nitride and silicon carbide layers. These materials can be integrated into existing CMOS-compatible fabrication lines, reducing the manufacturing barrier despite the advanced material requirements.
3Volume of moving object
If a compact integrated structure is used, then device size is reduced, but spatial resolution for magnetic field detection decreases
Solution Approach 1:
The patent implements a nested structure where the microwave antenna is formed within metal layers that are part of the semiconductor integrated circuit, the photodetector is integrated on the same chip, and the optical path is routed through waveguides embedded in the device structure. This nesting achieves compact volume while maintaining the functional separation needed for high spatial resolution magnetic field detection.
Solution Approach 2:
The patent uses three-dimensional integration with multiple metal layers for microwave transmission and optical waveguides routed through different planes. This dimensional separation allows the compact footprint to maintain adequate spacing between functional elements, preserving spatial resolution while achieving miniaturization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor achieves enhanced sensitivity and spatial resolution for measuring magnetic fields by utilizing materials like silicon nitride and silicon carbide for light transmission, and incorporating permanent magnets for magnetic bias, enabling accurate detection of small magnetic field changes.
Implementation Method 1
the fluorescence of a crystal defect arising from excitation by an optical signal may be affected by the presence of a magnetic field when the crystal defect is subject to microwave pumping at a resonant frequency
Implementation Method 2
Optical detection of magnetic resonances (ODMR) is a technique in which the fluorescence of a crystal defect arising from excitation by an optical signal may be affected by the presence of a magnetic field
Implementation Method 3
when the crystal defect is subject to microwave pumping at a resonant frequency
Implementation Method 4
a photodetector in optical communication with the plurality of color centers
Data Source
AI summary
Embodiments of an integrated apparatus for measuring an external magnetic or other external stimulus are presented herein. This apparatus may include a semiconductor integrated circuit comprising a plurality of metal layers; a solid-state host disposed on the semiconductor integrated circuit and comprising a plurality of color centers; a photonic integrated circuit disposed on the solid-state host and comprising optical modulators and a grating array in optical communication with the plurality of color centers via a material capable of transmitting light below 1000 nm; a microwave antenna formed in a first metal layer in the plurality of metal layers of the semiconductor integrated circuit; and a photodetector in optical communication with the plurality of color centers.