Semiconductor Chip Transfer Heads With Independent Radial Actuation
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Solution Overview
Problem
Existing semiconductor chip transfer apparatuses face issues with machine speed loss, quality inaccuracies, and increased downtime due to the use of multiple rotational motors, leading to mechanical inaccuracies and friction, which are exacerbated by the structural and operational constraints of traditional designs.
Innovation Solution
A simplified apparatus with a single rotational motor and actuator system, where each transfer head is independently actuated using a bar-linkage or cable-linkage mechanism, and optionally a magnet-coil drive unit, allowing for reduced friction and improved accuracy, enabling parallel manipulation of semiconductor chips.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If multiple rotational motors are used to drive transfer heads, then each transfer head can be actuated independently, but machine speed decreases due to time-sequential operation and friction losses increase
Solution Approach 1:
The system segments the actuation mechanism by providing each transfer head with its own dedicated rotational actuator, allowing independent control of each transfer head without interfering with others, thus enabling parallel operation and maintaining high machine speed
Solution Approach 2:
The patent replaces traditional mechanical bearing-based rotational actuators with voice coil actuators that use electromagnetic principles, eliminating mechanical friction and enabling precise, independent control of each transfer head without speed loss
2Device complexity
If multiple transfer heads are connected to the same rotational motor, then device complexity is reduced, but manufacturing precision deteriorates due to friction and impact mass
Solution Approach 1:
Each transfer head is equipped with its own dedicated rotational actuator rather than sharing a common motor, which eliminates the negative effects of friction and impact mass accumulation, thereby maintaining high manufacturing precision for chip placement
Solution Approach 2:
Voice coil actuators replace traditional mechanical rotational motors, eliminating mechanical friction and providing precise positional control for each transfer head, which significantly improves chip placement accuracy while maintaining reasonable device complexity
3Device complexity
If traditional rotational motors with bearings are used, then structural support is simplified, but reliability decreases due to friction and position control issues
Solution Approach 1:
Voice coil actuators replace traditional bearing-based rotational motors, eliminating mechanical friction and wear, which significantly improves reliability and position control stability for each transfer head while maintaining a manageable structural support construction
Solution Approach 2:
The patent introduces a magnetic field as an intermediary between the actuator and transfer head, using electromagnetic forces instead of direct mechanical contact, which eliminates friction and improves position control reliability
4Ease of operation
If volume-consuming motor support constructions are used, then each transfer head can have independent actuation, but adaptability decreases due to conversion time and servicing burden
Solution Approach 1:
Voice coil actuators replace bulky traditional rotational motors, dramatically reducing the volume required for actuator support constructions, which enables easier reconfiguration and reduces conversion time when adapting to different chip transfer configurations
Solution Approach 2:
The compact actuator design allows the system to be dynamically reconfigured for different operating conditions, reducing the burden of servicing and enabling faster adaptation to various chip transfer requirements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances machine speed, reduces mechanical inaccuracies, and minimizes downtime by allowing each transfer head to be actuated independently, resulting in improved operational flexibility and accuracy, while maintaining a compact construction with reduced volumetric dimensions.
Implementation Method 1
a magnet-coil drive unit for actuating the actuator element in the direction of the axis of rotation relative to the rotatable transfer assembly actuator
Data Source
AI summary
An apparatus for transferring chips from a first position to at least a second position includes: a rotatable transfer assembly including at least two transfer heads, each head for picking up a chip in the first position, and positioning the chip in the at least second position through rotation of the transfer assembly about an axis of rotation; a transfer assembly actuator for driving the transfer assembly together with the at least two transfer heads about the axis; and at least a first transfer head actuator structured for actuating at least one transfer head in a radial direction relative to the axis, the at least first transfer head actuator being mounted to the rotatable transfer assembly actuator and including an actuator element coupled to the at least one transfer head, the actuator element structured to be actuated in the direction of the axis relative to the rotatable transfer assembly actuator.