Lithography Chuck Cover Member for Flatness Control
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Solution Overview
Problem
In lithography devices, reducing the weight of the chuck to increase acceleration speed can lead to warping, which compromises the high flatness of substrates, as existing solutions like projections and recesses on the back surface are insufficient for maintaining substrate flatness during weight reduction.
Innovation Solution
A cover member that covers the back surface of the chuck, featuring a first removing member to remove foreign substances, is fixed to the holding portion, ensuring contact and preventing warping by matching the shape of the front and back surfaces, thereby maintaining substrate flatness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the weight of the chuck is reduced to increase acceleration speed, then productivity is improved, but warping occurs in the chuck causing loss of substrate flatness
Solution Approach 1:
The chuck is divided into a main body and a separate cover member. The cover member is detachably attached to the back surface of the chuck and includes projections and recesses that work together with corresponding structures on the chuck to prevent warping while allowing the chuck to be lightweight for high acceleration speed.
Solution Approach 2:
The cover member acts as an intermediary component between the chuck and the stage. It includes a removing member with projections and recesses that removes foreign substances and prevents warping, while the chuck itself remains lightweight for high acceleration speed.
2Object-affected harmful factors
If projections and recesses are provided only on the back surface of the chuck, then foreign substance removal is achieved, but warping occurs during conveying
Solution Approach 1:
The chuck is segmented into a main body and a cover member. The cover member includes the removing member with projections and recesses, while the chuck main body remains simple and lightweight. This segmentation allows the removing function to be separated from the structural support function.
Solution Approach 2:
The cover member serves as an intermediary that provides the removing member with projections and recesses for foreign substance removal, while the chuck main body maintains structural integrity without warping during conveying.
3Productivity
If the chuck is made lighter to increase acceleration speed, then productivity improves, but additional conveying mechanisms are required to maintain flatness
Solution Approach 1:
The cover member performs multiple functions: it serves as a protective cover for the back surface, provides the removing member for foreign substance removal, and acts as a structural component to prevent warping. This multi-functionality eliminates the need for additional conveying mechanisms while maintaining substrate flatness.
Solution Approach 2:
The cover member merges multiple functions into a single component: foreign substance removal, warping prevention, and structural support. This integration eliminates the need for separate conveying mechanisms, maintaining simplicity while ensuring high flatness.
Data Source
AI summary
A cover member that covers a first surface on an opposite side with respect to a holding surface of a holding portion that holds a substrate, the cover member including a first removing member that removes a foreign substance attached to the first surface, in which the cover member is capable of being fixed to the holding portion while the first surface and the first removing member are in contact with each other covering the first surface.