Chuck-Driving Device Weight Cancellation for High-Speed Substrate Stability
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Solution Overview
Problem
Current chuck-driving devices for semiconductor manufacturing face challenges in maintaining precise alignment and high-speed operation of substrates due to weight-related disturbances and oscillations, especially when optical systems lack autofocusing modules.
Innovation Solution
A chuck-driving device with a weight canceller and motor assembly, including a pneumatic cylinder and parallel plate springs, is designed to support the slider and cancel reaction forces, allowing for precise movement of the substrate while minimizing disturbances through a combination of air bearings and a voice coil motor.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the substrate stage weight is reduced to enable high-speed operation, then the operation speed improves, but the disturbance and oscillation increase
Solution Approach 1:
The patent introduces a counterweight mechanism that generates an opposing force to balance the gravitational force on the substrate stage. By positioning the counterweight and its support structure to create a moment that opposes the gravitational moment, the system achieves force balance, reducing disturbances and oscillations during high-speed operation.
Solution Approach 2:
The patent employs an intermediate support structure consisting of multiple support members that connect the counterweight to the base. These intermediate elements distribute and transmit forces smoothly, mediating between the counterweight and the substrate stage to minimize direct mechanical disturbances while maintaining force balance.
2Productivity
If the substrate position is driven at high speed, then the productivity improves, but the alignment precision deteriorates
Solution Approach 1:
By balancing gravitational forces through the counterweight mechanism, the system eliminates gravity-induced position drift and oscillation during high-speed movement. This force balance enables the substrate stage to maintain precise alignment with the optical system even during rapid positioning, allowing high productivity without sacrificing measurement precision.
3Stability of the object's composition
If a weight canceller is added to support the slider, then the oscillation is reduced, but the device complexity increases
Solution Approach 1:
The weight canceller is implemented as a counterweight supported by multiple support members that extend from the base. This configuration balances the slider weight through gravitational counterbalance, reducing oscillation and improving stability. The design integrates the counterweight mechanism into the existing device structure, minimizing additional complexity while achieving the desired stability improvement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables high-precision, high-speed substrate movement with reduced oscillations and improved alignment accuracy, enhancing the reliability of semiconductor processing and inspection processes by effectively managing weight and reaction forces.
Implementation Method 1
a pneumatic cylinder positioned on the base and to support the slider in the third direction
Implementation Method 2
a motor assembly positioned on the base, around the pneumatic cylinder, and configured to drive the slider in the third direction. The motor assembly includes: a coil base having a hollow portion disposed around sides of the pneumatic cylinder; a coil assembly positioned on the coil base and disposed around the sides of the pneumatic cylinder; and a magnet assembly adjacent to a part of the coil assembly
Data Source
AI summary
A chuck-driving device includes a base extending in first and second directions. The second direction crosses the first direction. The chuck-driving device further includes a slider positioned on the base and configured to move in a third direction substantially perpendicular to the first and second directions, and a pneumatic cylinder positioned on the base and to support the slider in the third direction. The chuck-driving additionally includes a motor assembly positioned on the base, around the pneumatic cylinder, and configured to drive the slider in the third direction. The motor assembly includes a coil base having a hollow portion disposed around sides of the pneumatic cylinder, a coil assembly positioned on the coil base and disposed around the sides of the pneumatic cylinder, and a magnet assembly adjacent to a part of the coil assembly.