Electrostatic Chuck Needle Fixture for Uniform Installation Height
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Solution Overview
Problem
During semiconductor wafer manufacturing, the manual installation and replacement of needles on electrostatic chucks lead to inefficiencies, damage, and machining errors due to inconsistent heights and horizontal deviations, resulting in low efficiency and increased risk of wafer breakage.
Innovation Solution
An installation fixture comprising a positioning tray with corresponding holes and a height-adjustable installation fixture ensures accurate and uniform needle installation, using a measuring device and pressing rod to adjust and secure needle depths, thereby stabilizing semiconductor device positions and preventing errors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual measurement and installation method is used, then installation flexibility is maintained, but installation precision and consistency deteriorate
Solution Approach 1:
The patent introduces a positioning tray as an intermediary tool between the manual operator and the needle installation process. The tray includes positioning structures that guide needle installation at predetermined positions, ensuring height consistency while allowing flexible manual operation. This mediator resolves the contradiction by providing both operational flexibility and precision control.
Solution Approach 2:
The positioning tray is designed with self-positioning features including positioning holes and guiding structures that automatically ensure correct needle placement without requiring complex measurement tools or highly skilled operators. The system serves itself by incorporating built-in positioning mechanisms that maintain precision through their structure rather than through complex external control.
2Device complexity
If manual needle installation is used, then equipment complexity is reduced, but productivity and installation efficiency deteriorate
Solution Approach 1:
The installation system is segmented into modular components: a positioning tray with multiple positioning holes, each hole equipped with positioning structures. This segmentation allows parallel installation of multiple needles simultaneously at different positions, significantly improving productivity while keeping each individual component simple and easy to manufacture.
Solution Approach 2:
The positioning tray is pre-configured with positioning holes and guiding structures before the installation process begins. This preliminary preparation of the installation environment enables operators to quickly install needles without performing measurements or adjustments during the installation process, thereby improving efficiency without adding complex equipment.
3Device complexity
If manual needle installation is used, then device complexity is reduced, but installation precision and wafer position stability deteriorate
Solution Approach 1:
The positioning tray acts as an intermediary device that ensures precise needle installation without requiring complex measurement and adjustment equipment. The tray incorporates positioning holes and guiding structures that physically constrain needle placement, guaranteeing consistent height and position stability for subsequent wafer processing while maintaining overall system simplicity.
Solution Approach 2:
The positioning tray is designed with fixed geometric parameters including hole positions, depths, and guiding structure dimensions that are precisely manufactured. These predetermined parameters ensure that needles are installed at correct heights and positions, providing wafer position stability through built-in geometric constraints rather than through complex active control systems.
Data Source
AI summary
An installation fixture for needle is used to install needles of an electrostatic chuck, and includes: a positioning tray, detachably disposed on an outer base of the electrostatic chuck, the positioning tray being provided with installation holes, and the installation holes corresponding to installation positions of the needles of the electrostatic chuck; and an installation fixture, detachably installed in the installation hole to adjust the installation depth of the needle.