Chuck Pin State Detection Using Image Matching Under Contamination

Solution Overview

Problem

In substrate processing apparatuses, the detection accuracy of the open/closed state of chuck pins is compromised due to contamination from treatment solutions or mist, which can adhere to sensors and impair their functionality.

Innovation Solution

A state detection device and method that utilize a photographing unit to capture images of the chuck pins, perform matching processing between target and reference images to calculate matching coordinates, and detect the open/closed state of the chuck pins based on these coordinates, eliminating the need for sensors at the end portion of the substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a sensor is arranged at the end portion of the substrate to detect the open/closed state of the chuck pin, then the detection function is achieved, but the detection accuracy is lowered due to contamination from treatment solution or mist

Engineering Contradiction:

Improvedetection functionVSAvoiddetection accuracy

Core Design Contradiction:

ReliabilityVSMeasurement precision

Solution Approach 1:

The patent uses image copying by photographing the chuck pin with a camera and comparing it with a reference image to determine the open/closed state. This optical copying method replaces the physical sensor contact method, avoiding contamination issues while maintaining detection functionality.

Inventive Principle:

Principle #26Copying

Solution Approach 2:

The patent replaces the mechanical sensor-based detection system with an optical image-based detection system. By using a camera to photograph the chuck pin and analyzing the image data, the system eliminates the need for physical sensors that are susceptible to contamination from treatment solutions and mist.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Object-affected harmful factors

If a camera is used to photograph the chuck pin instead of a sensor, then contamination is avoided, but detection accuracy may be compromised without proper image matching processing

Engineering Contradiction:

Improvecontamination resistanceVSAvoiddetection accuracy

Core Design Contradiction:

Object-affected harmful factorsVSMeasurement precision

Solution Approach 1:

The patent performs preliminary action by creating a reference image of the chuck pin in a known state before actual detection. This reference image is stored and used for comparison during operation, enabling accurate detection even when the chuck pin is in motion or under varying lighting conditions, thus maintaining high detection accuracy with the camera-based system.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent uses image copying by photographing the chuck pin with a camera and comparing it with a reference image to determine the open/closed state. This optical copying method replaces the physical sensor contact method, avoiding contamination issues while maintaining detection functionality.

Inventive Principle:

Principle #26Copying

3Measurement precision

If image matching processing is performed between target and reference images, then detection accuracy is maintained, but device complexity increases

Engineering Contradiction:

Improvedetection accuracyVSAvoidsystem complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent uses image copying by photographing the chuck pin with a camera and comparing it with a reference image to determine the open/closed state. This optical copying method replaces the physical sensor contact method, avoiding contamination issues while maintaining detection functionality.

Inventive Principle:

Principle #26Copying

Solution Approach 2:

The patent implements feedback by continuously comparing the photographed chuck pin image with the reference image and using the matching results to determine the open/closed state. This feedback mechanism ensures accurate detection while the system automatically adjusts based on the image comparison results.

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for accurate detection of the open/closed state of chuck pins while preventing a decrease in detection accuracy, even in the presence of contamination, by using image-based matching processing.

Implementation Method 1

a photographing unit configured to photograph at least a part of the chuck pin

Methodology Applied

Scientific EffectLight reflection: Reflection

Implementation Method 2

a matching coordinate calculation unit configured to perform matching processing between the target image and a reference image

Methodology Applied

Scientific EffectImage processing: Image Processing

Data Source

PatentUS12278083B2Substrate holder state detection device and substrate holder state detection method

Publication Date: 2025.04.15 SCREEN HOLDINGS CO LTD

AI summary

A state detection device includes at least one chuck pin for holding a substrate, a photographing unit configured to photograph the chuck pin, and set at least one image to be obtained as a target image, a matching coordinate calculation unit, namely a data matching calculator, configured to perform matching processing between the target image and a reference image which is at least one image showing the chuck pin, and calculate matching coordinates, which are coordinates indicating a position of the reference image in the target image when a matching score between the reference image and the target image is the highest, and a detection unit, namely a detector, configured to detect an open/closed state of the chuck pin based on the matching coordinates. Therefore, the open/closed state of the chuck pin can be detected while maintaining high detection accuracy.