Chuck Table Feed Control for Variable-Load Wafer Processing
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Solution Overview
Problem
The existing dicing apparatuses face reduced productivity when processing substrates of varying sizes or shapes due to inadequate control over the feeding mechanism's acceleration, leading to excess load on the feeding mechanism, especially when handling smaller or lighter chuck tables.
Innovation Solution
A processing apparatus with a control unit that sets and adjusts feeding conditions, including acceleration and rotational drive settings, based on the selected chuck table size or shape, to optimize the feeding mechanism's performance and prevent excess load.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If feeding conditions are set based on the largest chuck table weight, then the feeding mechanism can handle the heaviest load, but the acceleration is limited and productivity is reduced when processing smaller workpieces
Solution Approach 1:
The patent applies dynamics by making the feeding conditions variable rather than fixed. The control unit dynamically adjusts acceleration and other feeding parameters based on the actual chuck table weight detected during operation. This allows the system to optimize performance for each specific workpiece size, achieving both high load capacity for large workpieces and high speed for small workpieces without compromise.
Solution Approach 2:
The patent implements parameter changes by modifying the feeding conditions (acceleration, speed, position) according to the detected chuck table weight. The control unit changes these parameters in real-time based on the actual load, enabling the feeding mechanism to operate at optimal parameters for each specific configuration rather than being constrained by worst-case scenarios.
2Productivity
If feeding conditions are set for maximum acceleration, then productivity is improved, but excess load is applied to the feeding mechanism when processing smaller workpieces
Solution Approach 1:
The patent applies feedback by using the detected chuck table weight information to adjust the feeding conditions. The control unit receives feedback about the actual load (via weight detection) and uses this information to set appropriate acceleration and speed parameters, preventing both excess load application and suboptimal performance.
Solution Approach 2:
The patent implements parameter changes by adjusting feeding conditions based on the actual chuck table weight. When a lighter chuck table is detected, the system reduces acceleration and speed parameters accordingly, preventing excess load application while still maintaining optimal productivity for that specific configuration.
3Device complexity
If a fixed feeding condition is used for all chuck tables, then the control system is simple, but the acceleration is suboptimal for smaller workpieces leading to reduced productivity
Solution Approach 1:
The patent applies self-service by enabling the control unit to automatically detect the chuck table weight and self-adjust the feeding conditions without external intervention. The system serves itself by using its own detection capabilities to optimize its operation, eliminating the need for manual parameter setting while achieving optimal productivity.
Solution Approach 2:
The patent implements feedback by using weight detection information to automatically adjust feeding parameters. The control unit receives feedback about the actual configuration and uses this to optimize acceleration and speed, achieving high productivity without requiring complex manual programming or external control inputs.
Data Source
AI summary
A processing apparatus includes a holding unit holding a workpiece, a processing unit processing the workpiece held by the holding unit, a feeding mechanism for feeding the holding unit, and a control unit controlling the feeding mechanism. The holding unit has a chuck table for holding the workpiece and a base for detachably supporting the chuck table. The chuck table includes a plurality of kinds of chuck tables, one of which being selected according to the size or shape of the workpiece. The base is capable of mounting the chuck table selected from the plural kinds of chuck tables. The control unit functions to set feeding conditions including acceleration of the feeding mechanism according to the kind of the chuck table mounted on the base and to control the feeding mechanism under the feeding conditions according to the chuck table.