Chuck Table Gas Ejection for Foreign Matter Prevention

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Solution Overview

Problem

Existing processing apparatuses for plate-shaped workpieces require additional cleaning units to prevent foreign matter deposition on chuck table holding surfaces, incurring installation costs and maintenance needs.

Innovation Solution

A processing apparatus with a chuck table featuring a gas ejection port connected to a gas supply system, which forms a protective gas layer over the holding surface when no workpiece is present, preventing foreign matter deposition without the need for an additional cleaning unit.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If a cleaning unit is provided to prevent foreign matter deposition on the holding surface, then the holding surface cleanliness is improved, but the device complexity and installation costs increase

Engineering Contradiction:

Improveforeign matter deposition on holding surfaceVSAvoidcleaning unit structure

Core Design Contradiction:

Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The invention extracts the harmful foreign matter particles from the environment by using a gas stream to blow them away from the holding surface before they can be deposited. This eliminates the need for a complex cleaning unit by directly removing the contaminant source rather than adding a separate cleaning mechanism.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The invention replaces the mechanical cleaning unit with a gas-based protective mechanism. Instead of using mechanical means to clean or protect the holding surface, a gas stream is used to create a protective flow that prevents foreign matter deposition, thereby reducing device complexity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Object-affected harmful factors

If a cleaning unit is installed to protect the holding surface, then the holding surface cleanliness is improved, but the maintenance requirements and costs increase

Engineering Contradiction:

Improveforeign matter deposition on holding surfaceVSAvoidcleaning unit maintenance

Core Design Contradiction:

Object-affected harmful factorsVSEase of repair

Solution Approach 1:

The gas ejection system provides continuous self-protection for the holding surface by maintaining a gas flow that actively prevents foreign matter deposition. This self-service mechanism eliminates the need for separate maintenance operations required by traditional cleaning units.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The gas stream performs preliminary protection by preventing foreign matter from reaching the holding surface in the first place. This proactive approach eliminates the need for subsequent cleaning maintenance that would be required if foreign matter were allowed to deposit and then needed removal.

Inventive Principle:

Principle #10Preliminary action

3Object-affected harmful factors

If the chuck table is kept clean to prevent workpiece damage, then the workpiece quality is improved, but the additional cleaning equipment increases installation costs

Engineering Contradiction:

Improveworkpiece damage from foreign matterVSAvoidinstallation cost

Core Design Contradiction:

Object-affected harmful factorsVSEase of manufacture

Solution Approach 1:

The invention merges the foreign matter prevention function directly into the existing chuck table structure by integrating gas ejection ports into the table design. This combination eliminates the need for separate cleaning equipment while maintaining workpiece protection, thereby reducing installation costs.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The gas stream serves as an intermediary between the external environment and the holding surface, creating a protective barrier that prevents foreign matter from contacting the workpiece. This intermediary approach protects workpiece quality without requiring expensive additional cleaning equipment.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus effectively protects the chuck table surface from foreign matter deposition without requiring an additional cleaning unit, reducing installation and maintenance costs while ensuring cleanliness.

Implementation Method 1

the control unit controls the gas supply system to eject a gas from the gas ejection port to form a protective layer of the gas over the holding surface

Methodology Applied

Scientific EffectGas layer formation: Boundary Layer

Data Source

PatentUS20230076401A1Processing apparatus

Publication Date: 2023.03.09 DISCO CORP

AI summary

A processing apparatus includes a chuck table having a holding surface for holding a plate-shaped workpiece thereon, a processing unit for processing the plate-shaped workpiece held on the chuck table, a delivery unit for selectively delivering the plate-shaped workpiece onto and from the chuck table, and a control unit for controlling the chuck table, the processing unit, and the delivery unit. The chuck table includes a gas ejection port defined in or around the holding surface and connected to a gas supply system. While the plate-shaped workpiece is not placed on the holding surface, the control unit controls the gas supply system to eject a gas from the gas ejection port to form a protective layer of the gas over the holding surface, thereby preventing foreign matter from being deposited on the holding surface.