Chuck Table Oil Detection Using Photoluminescent Lubricants
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Solution Overview
Problem
Oil contamination of workpieces occurs due to adhesion of oil to the processing chamber components during operation of processing apparatuses, leading to contamination of workpieces during processing.
Innovation Solution
Incorporation of a processing apparatus with a chuck table, horizontal and vertical moving mechanisms supplied with oils containing photoluminescence particles, a camera, and a light source to detect oil adhesion on the holding surface by imaging and identifying the presence of oil based on emitted light colors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If oil is applied to guide rails and ball screws for lubrication, then moving mechanisms operate smoothly, but oil may adhere to operator's hands and contaminate the processing chamber
Solution Approach 1:
The patent applies photoluminescence particles to the oil used in moving mechanisms. These particles cause the oil to emit light when irradiated, creating a visible color change that allows detection of oil adhesion on the holding surface. This resolves the contradiction by enabling monitoring of oil contamination without changing the lubrication function, thus maintaining smooth operation while preventing undetected contamination.
2Reliability
If oil adheres to component parts in the processing chamber, then lubrication function is maintained, but workpiece contamination occurs during processing
Solution Approach 1:
The patent implements a feedback mechanism where a camera captures images of the holding surface, detects photoluminescence particles indicating oil adhesion, and provides information to determine whether processing should proceed. This feedback loop prevents workpiece contamination by identifying oil adhesion on component parts before processing occurs, while maintaining the lubrication function through continued oil application.
3Productivity
If processing is conducted without oil contamination detection, then productivity is maintained, but workpiece quality deteriorates due to contamination
Solution Approach 1:
The patent performs oil contamination detection using photoluminescence particles and camera imaging before workpiece processing begins. This preliminary action identifies potential contamination sources in advance, allowing the system to prevent processing under contaminated conditions. This maintains workpiece quality without significantly impacting productivity, as the detection process is integrated and rapid.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents oil contamination of workpieces by detecting and identifying the source of oil adhesion on the holding surface, allowing for timely intervention and maintaining a clean processing environment.
Implementation Method 1
a horizontal moving mechanism that moves the chuck table in a horizontal direction relative to the processing unit and is supplied with a first oil containing first photoluminescence particles; a vertical moving mechanism that moves the processing unit in a vertical direction relative to the chuck table and is supplied with a second oil containing second photoluminescence particles
Data Source
AI summary
A processing apparatus includes a chuck table having a holding surface for holding a workpiece; a horizontal moving mechanism that moves the chuck table in a horizontal direction and is supplied with a first oil; and a vertical moving mechanism that moves a processing unit in a vertical direction and is supplied with a second oil. Before mounting the workpiece on the holding surface, the holding surface is imaged by a camera while being irradiated with light, and it is examined whether or not the picked-up image is emitting light. If there is a light-emitting part in the picked-up image, it is determined that oil is adhered to the light-emitting part.