Chuck Table Inclination Mechanism for High-Load Parallelism
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Solution Overview
Problem
Existing inclination adjusting mechanisms for chuck tables in grinding apparatuses experience a change in parallelism under high load conditions, leading to inaccuracies in workpiece grinding.
Innovation Solution
An inclination adjusting mechanism comprising an annular upper ring plate, a lower ring plate, and a base connected by a rotating mechanism and air bearings, with a connecting mechanism that includes an electromagnet for enhanced rigidity and stability, preventing parallelism changes during high-load grinding.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the chuck table is supported at three points arranged at even intervals in the circumferential direction, then the inclination adjusting mechanism can be simpler in structure, but the rigidity is insufficient under high load conditions causing parallelism changes
Solution Approach 1:
The support structure is segmented into multiple independent support points distributed around the chuck table circumference. Instead of using three集中 support points, the invention divides the support into numerous points arranged circumferentially, which distributes the load and prevents deformation while maintaining structural simplicity through modular repetition of the same support element pattern.
2Device complexity
If the chuck table is supported by three vertically movable columns or blocks, then the device complexity is reduced, but the rigidity is insufficient under high load causing inclination changes
Solution Approach 1:
The support structure transitions from a one-dimensional vertical support arrangement to a two-dimensional circumferential distribution pattern. Multiple support points are arranged around the circumference of the chuck table, creating a planar support network that provides superior resistance to rotational and lateral forces while maintaining vertical load-bearing capability, thus enhancing parallelism stability under high load conditions.
3Manufacturing precision
If the inclination adjusting mechanism uses a larger support area with ring plates, then the rigidity and parallelism stability are improved under high load, but the device complexity increases
Solution Approach 1:
The annular support plates serve multiple functions simultaneously: they provide a large distributed support area for enhanced rigidity, act as mounting surfaces for multiple circumferential support points, facilitate rotational adjustment of the chuck table, and maintain parallelism under high load. This multi-functionality reduces the need for separate components, thereby limiting the increase in overall device complexity while achieving superior performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The mechanism ensures uniform accuracy and prevents parallelism changes during high-load grinding, maintaining the precision of the workpiece thickness post-grinding.
Implementation Method 1
the first bearing and the second bearing each include an air bearing
Implementation Method 2
the connecting mechanism includes an electromagnet capable of magnetically attach the upper ring plate, the lower ring plate, and the base to one another
Data Source
AI summary
There is provided an inclination adjusting mechanism including an annular upper plate that has an upper surface for connecting a table and a lower surface inclined relative to the upper surface, an annular lower plate that has an upper surface parallel to the lower surface of the upper plate and a lower surface parallel to the upper surface of the upper plate and facing an upper surface of a base, an upper rotating mechanism that rotates the upper plate, a lower rotating mechanism that rotates the lower plate, a first bearing provided between the lower surface of the upper plate and the upper surface of the lower plate, a second bearing provided between the lower surface of the lower plate and the upper surface of the base, and a connecting mechanism that connects the upper plate, the lower plate, and the base.