Chuck Table Rotation for Safe Reprocessing of Uncut Streets
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Solution Overview
Problem
Existing processing apparatuses face challenges in resuming workpiece processing after abnormalities, leading to unprocessed regions, tool breakage, and reduced efficiency, as they often require labor-intensive and time-consuming procedures to reprocess without applying load to the processing tool or minimizing device chip production.
Innovation Solution
A processing apparatus with a chuck table, processing unit, and controller that rotates the workpiece by 180 degrees to reprocess unprocessed regions from the opposite end, allowing for efficient continuation of processing without applying load to the tool and minimizing device chip loss, utilizing a cutting or laser processing unit with an abnormality detecting section and imaging unit for precise control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If processing is resumed from the position where it stopped after an abnormality, then the unprocessed region can be completed, but the processing tool may break due to unexpected force from abnormal processing marks
Solution Approach 1:
The patent applies inversion by rotating the chuck table 180 degrees to process the unprocessed region from the opposite direction. Instead of resuming from the abnormal position, the workpiece is reoriented so that processing continues from the other end of the street, avoiding the abnormal processing mark while still completing the unprocessed region.
Solution Approach 2:
The patent segments the processing path by dividing the street into processed and unprocessed regions, then processes the unprocessed region separately from the opposite direction. This segmentation allows the processing tool to avoid the abnormal area while still completing the necessary processing.
2Reliability
If reprocessing is abandoned and processing resumes from the next street, then tool breakage is avoided, but unprocessed regions remain and device chip production decreases
Solution Approach 1:
Instead of abandoning the current street or resuming from the abnormal position, the patent inverts the approach by rotating the workpiece 180 degrees and processing the unprocessed region from the opposite direction. This ensures complete processing of all streets while maintaining tool safety.
3Reliability
If manual operation is used to reprocess the street from a preferable position, then tool breakage is avoided, but labor and time are required and processing efficiency significantly lowers
Solution Approach 1:
The system performs self-service by automatically detecting abnormalities, calculating safe reprocessing paths, rotating the chuck table, and executing the reprocessing without manual intervention. This automation eliminates the need for operator judgment and manual operation while maintaining tool safety and processing efficiency.
Solution Approach 2:
The patent changes the processing parameters by rotating the chuck table 180 degrees, thereby changing the direction of processing from the original direction to the opposite direction. This parameter change allows automatic resumption of processing from a safe position without manual intervention.
Data Source
AI summary
A processing apparatus that processes a workpiece includes a chuck table that holds the workpiece including multiple streets that intersect each other on a holding surface, a processing unit that processes the workpiece held by the chuck table along a corresponding one of the streets, and a controller. When processing is suspended with an unprocessed region left while the processing unit is caused to process the workpiece from one end to the other end of the street, the controller rotates the chuck table by 180 degrees and causes the processing unit to process the unprocessed region of the workpiece from the other end of the street.