Chuck Table Type Detection via Servo Torque Measurement

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Solution Overview

Problem

In treatment apparatuses for workpieces, incorrect selection of chuck tables can lead to improper holding and potential breakage of workpieces, and adding staff or complex confirmation mechanisms increases treatment costs.

Innovation Solution

A treatment apparatus with a determination unit that includes a torque recording section, a determination section, and a reporting section, using a servo motor to rotate the chuck table and measure torque to identify the type of chuck table mounted, allowing for automatic determination and alarm issuance for unsuitable chuck tables.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a chuck table corresponding to the workpiece is not mounted on the treatment apparatus, then the workpiece is not correctly held and a suitable treatment is not performed, but adding staff or complex confirmation mechanisms increases treatment cost

Engineering Contradiction:
Improvecorrect holding of workpieceVSAvoidconfirmation mechanism complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The treatment apparatus automatically determines the kind of chuck table mounted through a determination unit that measures torque during rotation and compares it with recorded torque characteristics. This self-determination eliminates the need for manual confirmation by staff or complex external confirmation mechanisms, while ensuring the correct chuck table is identified for reliable workpiece holding.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The determination unit provides feedback by measuring the actual torque required to rotate the mounted chuck table and comparing it with pre-recorded torque characteristics for different chuck table kinds. This feedback mechanism automatically confirms whether the correct chuck table is mounted, ensuring reliable workpiece holding without manual intervention.

Inventive Principle:
Principle #23Feedback

2Ease of operation

If a universal chuck table capable of holding workpieces of a plurality of sizes is used, then the operation of exchanging the chuck table can be omitted, but treatment cost of the workpiece would be raised since the chuck table and suction mechanism are complicated in configuration

Engineering Contradiction:
Improveoperation of exchanging chuck tableVSAvoidchuck table configuration complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The system dynamically adapts to different chuck table configurations by measuring the actual torque characteristics of the mounted chuck table and automatically determining its kind. This allows the use of simpler, exchangeable chuck tables instead of a single complex universal design, as the system can identify and adapt to whatever chuck table is mounted.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The determination unit detects changes in torque parameters during rotation to identify the specific kind of chuck table mounted. This parameter-based identification enables the system to work with various simple chuck table configurations rather than requiring a single complex universal design.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate identification of the chuck table type, preventing workpiece breakage and reducing treatment costs by eliminating the need for additional staff or complex confirmation mechanisms.

Implementation Method 1

a servo motor that rotates the table base around a rotational axis along a direction perpendicular to the holding surface of the chuck table mounted to the table base

Methodology Applied
Scientific EffectElectromagnetic conversion: Electromagnetic Induction

Implementation Method 2

a porous member at an upper surface of the chuck table and a suction source connected to the porous member. When a workpiece is mounted on the chuck table and the suction source is operated, a negative pressure acts on the workpiece, whereby the workpiece is suction held onto the chuck table

Methodology Applied
Scientific EffectNegative pressure suction: Suction

Data Source

PatentUS20230016598A1Treatment apparatus for treating workpiece
Publication Date: 2023.01.19 DISCO CORP
  • US20230016598A1 patent drawing
  • US20230016598A1 patent drawing
  • US20230016598A1 patent drawing

AI summary

A treatment apparatus including a chuck table, a table base, a servo motor that rotates the table base, and a determination unit that determines the kind of the chuck table mounted to the table base is provided. The determination unit includes a torque recording section in which a torque outputted by the servo motor when rotating the table base is recorded on the basis of the kind of the chuck table, and a determination section that collates the torque outputted by the servo motor with the torque recording section, to thereby determine the kind of the chuck table.