Coordinate-Based Coloring for Circuit Layout Consistency
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Solution Overview
Problem
Inconsistent photomask assignments in Double-Patterning Technology (DPT) compliant layouts due to varying color representations in EDA layout tools lead to uncertainties in semiconductor device manufacturing, causing process issues and potential defects.
Innovation Solution
A novel coloring method that systematically sorts and designates G0-linked networks with consistent colors using a coordinate-based approach, ensuring identical or similar G0-linked networks across different designs and locations receive the same coloring results, which can be stored as a fingerprint for consistent photomask assignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If random color assignment is used in EDA layout tools for photomask decomposition, then the decomposition process is simple and fast, but the coloring results are inconsistent across different designs and locations
Solution Approach 1:
The patent changes the parameter of color assignment from random to systematic coordinate-based assignment. By using the spatial coordinates (x, y) of circuit patterns as the basis for color assignment, the system transforms an unreliable random process into a deterministic one where the same spatial location always receives the same color assignment, ensuring consistency across different designs and locations while maintaining decomposition efficiency
Solution Approach 2:
The patent creates a fingerprint database that stores coordinate-based coloring results from reference designs. This fingerprint can be copied and applied to new or similar designs, ensuring that identical or similar circuit patterns receive identical color assignments. This copying mechanism guarantees consistency without requiring complete re-decomposition, thereby maintaining productivity while achieving reliability
2Reliability
If coordinate-based coloring method is used to ensure consistent photomask assignment, then coloring results are predictable and reliable, but the method complexity increases
Solution Approach 1:
The coordinate-based coloring method is self-service in nature because it automatically determines color assignments based on the inherent spatial coordinates of circuit patterns without requiring external intervention or complex decision-making. The system uses the pattern's own position (x, y coordinates) to determine its color, eliminating the need for manual assignment or complex algorithms, thus achieving reliability without excessive complexity
Solution Approach 2:
The patent creates a fingerprint database that stores coordinate-based coloring results from reference designs. This fingerprint can be copied and applied to new or similar designs, ensuring that identical or similar circuit patterns receive identical color assignments. This copying mechanism guarantees consistency without requiring complete re-decomposition, thereby maintaining productivity while achieving reliability
Data Source
AI summary
Implementations of the present disclosure provide coloring methods that sort and pre-color nodes of G0-linked networks in a multiple-patterning technology (MPT)-compliant layout design by coordinate. In one embodiment, a method includes identifying target networks in a circuit layout, each target network having two or more linked nodes representing circuit patterns, and each target network being presented in an imaginary X-Y coordinate plane, assigning a first feature to a first node in each target network, the first node is determined using a coordinate-based method, and assigning the first feature and a second feature to remaining nodes in each target network in an alternating manner so that any two immediately adjacent linked nodes in each target network have different features.