Circuit Pattern Measurement Point Mapping Across Rotated Layouts
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Solution Overview
Problem
Existing measurement systems for semiconductor circuit patterns require manual setting of measurement conditions for each circuit pattern, leading to increased work burden and potential errors as the number of patterns increases, which affects the reliability of obtaining consistent observation images.
Innovation Solution
A measurement system that sets a reference circuit pattern and applies inversion or rotation to measurement points and directions for other circuit patterns with the same configuration, automating the setting of measurement conditions across multiple patterns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual setting of measurement conditions is performed for each circuit pattern, then measurement reliability is maintained, but work burden and time consumption increase significantly
Solution Approach 1:
The patent creates master measurement condition data for standard cell patterns and automatically copies this data to measurement recipes for multiple circuit patterns. This copying mechanism eliminates manual re-setting while maintaining consistency, resolving the contradiction between reliability and time consumption.
Solution Approach 2:
The patent performs preliminary setting of measurement conditions by creating master measurement condition data in advance for standard cell patterns. This preliminary action allows automatic application to multiple patterns without repeated manual setting, reducing time loss while ensuring reliable measurements.
2Reliability
If the same measurement procedure is applied to multiple circuit patterns, then measurement consistency is improved, but the complexity of managing measurement conditions increases
Solution Approach 1:
The patent segments measurement condition management into two levels: master measurement condition data for standard cell patterns and measurement recipes for specific circuit patterns. This segmentation simplifies management by organizing conditions hierarchically, reducing complexity while ensuring consistency through automatic inheritance.
Solution Approach 2:
The patent creates universal master measurement condition data that can be applied to multiple circuit patterns through automatic copying. This universal data structure serves multiple functions across different patterns, reducing management complexity while maintaining consistent measurement procedures.
3Productivity
If measurement conditions are set automatically for multiple patterns, then productivity increases, but the risk of setting errors increases
Solution Approach 1:
The patent incorporates feedback mechanisms where the system determines whether circuit patterns match standard cell patterns, automatically copies measurement conditions only when appropriate, and allows manual correction when needed. This feedback loop ensures accurate automatic setting while maintaining reliability through verification and correction capabilities.
Data Source
AI summary
Provided is a technology that can reduce the work burden of setting measurement conditions for each circuit pattern when the same measurement procedure is performed on a plurality of circuit patterns formed on a semiconductor material. A measurement system according to the present disclosure sets a measurement point set in a reference circuit pattern for another circuit pattern having the same circuit pattern, applies inversion or rotation to the measurement point, and performs setting on the other circuit pattern, when the circuit pattern has a circuit pattern obtained by vertically inverting, horizontally inverting, or rotating a circuit pattern the same as the reference circuit pattern.