Air conditioning system, air conditioning method, and article manufacturing method
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Solution Overview
Problem
Existing air conditioning systems for semiconductor manufacturing device installation rooms struggle to efficiently adjust temperature, leading to increased running costs due to the need for significant output adjustments from coolers and heaters when temperature changes occur.
Innovation Solution
An air conditioning system that includes a heating element installation room, a circulation air conditioning unit to adjust exhaust heat air temperature, an air supply unit to supply outside air, an air exhaust unit to discharge exhaust heat air, and an adjustment unit to regulate air volume based on temperature differences between supplied and exhaust air.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the output of cooler and heater is increased to adjust temperature significantly, then the temperature control capability is improved, but the running costs increase
Solution Approach 1:
The invention converts the harmful exhaust heat discharged from the heating element installation room into a beneficial resource by circulating it back into the room. The circulation air conditioning unit captures exhaust heat air and returns it after temperature adjustment, transforming waste heat into useful thermal energy for maintaining room temperature, thereby reducing the need for additional heating or cooling and lowering running costs
Solution Approach 2:
The invention dynamically adjusts the air volume parameters of supplied air and discharged air based on the temperature difference between these two air streams. The air supply or exhaust adjustment unit modifies airflow parameters in response to temperature conditions, optimizing the balance between temperature control effectiveness and energy consumption
2Use of energy by moving object
If the air volume of supplied air and discharged air is optimized based on temperature difference, then energy efficiency is improved, but the system complexity increases
Solution Approach 1:
The circulation air conditioning unit performs multiple functions: it cools/exhausts heat air from the heating element installation room, adjusts the temperature of this exhaust heat air, and returns the adjusted air back to the room. This multi-functional approach consolidates several air handling operations into a single system, managing complexity while achieving energy efficiency
Solution Approach 2:
The air supply or exhaust adjustment unit implements feedback control by continuously monitoring the temperature difference between supplied air and exhaust heat air, and adjusting the air volume parameters accordingly. This closed-loop control optimizes energy efficiency while maintaining manageable system complexity through automated regulation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system efficiently maintains a constant temperature in the semiconductor manufacturing device installation room, reducing running costs by optimizing air volume and temperature adjustments, thereby achieving energy savings.
Implementation Method 1
a circulation air conditioning unit configured to adjust a temperature of exhaust heat air collected from the heating element installation room to a predetermined temperature
Implementation Method 2
a circulation air conditioning unit configured to adjust a temperature of exhaust heat air collected from the heating element installation room to a predetermined temperature
Implementation Method 3
an air supply unit configured to supply supplied air from the outside of the circulation air conditioning unit
Implementation Method 4
an air exhaust unit configured to discharge the exhaust heat air to the outside of the circulation air conditioning unit
Data Source
AI summary
An air conditioning system S includes a heating element installation room R in which a heating element N is installed, a circulation air conditioning unit 10 configured to adjust a temperature of exhaust heat air B2 collected from the heating element installation room R to a predetermined temperature and returns it to the heating element installation room R, an air supply unit 30 configured to supply supplied air B3 from the outside CR of the circulation air conditioning unit 10, an air exhaust unit 40 configured to discharge the exhaust heat air B to the outside CR of the circulation air conditioning unit 10, and an air supply or exhaust adjustment unit 50 configured to adjust an air volume of the supplied air B3 and an air volume of discharged air B2b discharged from the air exhaust unit 40 on the basis of a difference in temperature between the supplied air B3 and the exhaust heat air B2.