Clad Electrostatic Chuck Electrode for Thermal Shock Resistance
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Solution Overview
Problem
Conventional electrostatic chucks face issues with thermal shock resistance and durability due to high thermal expansion coefficients, leading to ceramic dielectric layer peeling or cracking, which shortens their service life and increases manufacturing costs.
Innovation Solution
A method of manufacturing an electrostatic chuck with a clad electrode layer using a composite powder of aluminum or aluminum alloy and carbon-based nanomaterials, including carbon nanotubes, graphene, etc., to create a multilayer billet with a core and shell structure, followed by extrusion and dielectric layer formation via thermal spraying, which reduces thermal expansion and enhances heat dissipation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional electrostatic chuck uses a simple electrode structure, then manufacturing cost is reduced, but thermal shock resistance and durability deteriorate due to high thermal expansion coefficients causing ceramic dielectric layer peeling or cracking
Solution Approach 1:
The patent applies composite materials by combining aluminum powder with carbon-based nanomaterials (carbon nanotubes, graphene, carbon nanofibers, or carbon nanoparticles) to create a composite electrode layer. This composite structure reduces the thermal expansion coefficient while maintaining electrical conductivity and heat dissipation properties, thereby improving thermal shock resistance and durability without excessive structural complexity
Solution Approach 2:
The patent changes the physical and chemical parameters of the electrode material by controlling the ratio of carbon-based nanomaterials to aluminum powder (0.1-10 parts by volume), adjusting particle size distributions, and optimizing sintering conditions. These parameter changes enable tuning of thermal expansion coefficient, electrical conductivity, and mechanical strength to achieve improved thermal shock resistance
2Temperature
If the electrostatic chuck uses high thermal conductivity materials, then heat dissipation property is improved, but weight increases
Solution Approach 1:
The patent uses a composite of aluminum (which has high thermal conductivity) and carbon-based nanomaterials (which have excellent thermal conductivity and are lightweight). This composite achieves superior heat dissipation properties while maintaining low weight, as carbon nanotubes and graphene have high strength-to-weight and thermal conductivity-to-weight ratios
Solution Approach 2:
The patent incorporates carbon-based nanomaterials specifically in the electrode layer where heat dissipation is most critical, while other parts of the electrostatic chuck can use different materials optimized for their specific functions. This localized application of high-performance composite material improves heat dissipation where needed without unnecessarily increasing overall weight
3Productivity
If the electrostatic chuck operates in harsh environments with repeated heating and cooling cycles, then processing capability is maintained, but durability deteriorates due to thermal fatigue
Solution Approach 1:
The composite electrode layer made of aluminum and carbon-based nanomaterials exhibits superior thermal fatigue resistance due to the complementary properties of the constituents. The carbon nanomaterials provide thermal stability and crack resistance, while aluminum provides ductility and heat conductivity, enabling the structure to withstand repeated thermal cycling without degradation
Solution Approach 2:
The patent incorporates carbon-based nanomaterials that act as reinforcement agents throughout the electrode layer, providing preemptive structural support against thermal stress and fatigue. These nanomaterials create a robust network that cushions against thermal expansion/contraction stresses before damage can occur, extending service life in harsh thermal environments
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method results in an electrostatic chuck with improved thermal shock resistance, durability, and heat dissipation properties, reducing the need for frequent replacements and enhancing semiconductor production efficiency.
Implementation Method 1
A method of manufacturing an electrostatic chuck with a clad electrode layer using a composite powder of aluminum or aluminum alloy and carbon-based nanomaterials... which reduces thermal expansion and enhances heat dissipation
Implementation Method 2
dielectric layer formation via thermal spraying
Data Source
AI summary
This application relates to a method of manufacturing an electrostatic chuck having a high heat dissipation property and high thermal shock resistance and being lightweight, and an electrostatic chuck manufactured by the method. In one aspect, the method includes preparing a composite powder by milling (i) aluminum or aluminum alloy powder and (ii) carbon-based nanomaterial powder through ball milling. The method may also include manufacturing a multilayer billet including a core layer and one or more shell layers surrounding the core layer, in which at least one of the core and shell layers contains the composite powder. The method may further include extruding the multilayer billet to form an electrode layer and forming a dielectric layer on the electrode layer.