Clean Room Gas Monitoring with Data Loss Recovery Alerts
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Solution Overview
Problem
Existing semiconductor clean room monitoring systems face inaccuracies due to data loss during the transmission of airborne molecular contaminant concentration data, leading to incomplete monitoring results.
Innovation Solution
A method and system that detect data loss during transmission, re-obtain the lost data, and generate warning information only when complete data indicates gas concentrations exceed preset thresholds, ensuring accurate monitoring by using a first and second server setup where the second server receives initial data, determines data loss, retrieves lost data, and sends warnings based on complete environmental data.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If concentration data is transmitted from measurement device to monitoring system, then monitoring function is achieved, but data loss occurs during transmission
Solution Approach 1:
The patent applies preliminary action by performing data integrity verification before final monitoring decisions. The monitoring system first receives concentration data, then verifies its completeness through checksum validation or data structure checking. Only after confirming data integrity does the system proceed to compare concentrations with thresholds and generate alarms. This preliminary verification step prevents erroneous monitoring results caused by transmitted data loss.
Solution Approach 2:
The patent implements feedback by establishing a data integrity verification loop. When data is transmitted from the measurement device to the monitoring system, the system automatically verifies the received data's completeness. If data loss is detected, the system can request retransmission or flag the monitoring result as invalid. This feedback mechanism ensures that monitoring decisions are based on complete and accurate concentration data.
2Measurement precision
If data loss detection and recovery mechanisms are added, then monitoring accuracy is improved, but system complexity increases
Solution Approach 1:
The patent applies preliminary action by embedding data integrity verification logic into the existing data reception process. Rather than adding a separate complex recovery system, the patent incorporates checksum validation and data completeness checking directly into the data reception and processing flow. This approach improves monitoring accuracy while minimizing additional system complexity by integrating verification functions into existing components.
Solution Approach 2:
The patent implements self-service through automatic data integrity verification and error handling. The monitoring system automatically detects data loss through validation checks and autonomously handles recovery by requesting retransmission or marking data as invalid. This self-service capability improves monitoring accuracy without requiring complex external intervention systems, as the system manages its own data quality assurance.
Data Source
AI summary
A method for monitoring environmental data and a monitoring system are provided. The method includes that: a second server receives first environmental data from a first server; the second server determines that data loss occurs in the first environmental data; the second server obtains lost data in the first environmental data from the first server; the second server obtains second environmental data according to the first environmental data and the lost data; and responsive to a concentration of a sampled gas in the second environmental data exceeding a preset concentration threshold, the second server sends warning information to a terminal device.